PPT purification eliminates process variables

B. Gotlinsky, J. O'Sullivan, Farhang Shadman, M. Horikoshi, S. Babasaki

Research output: Contribution to journalArticle

Abstract

A reactive filter for point-of-use (POU) purification can attain gas purity at the low-single-digit parts per trillion (ppt) level. A composite of intercalate reactive metal compounds forms an integral part of the existing fibrous filter matrix to create a POU purification surface. The reactive sites are located on the stainless steel filter medium to ensure contact and subsequent removal of homogeneous impurities.

Original languageEnglish (US)
Pages (from-to)67-74
Number of pages8
JournalSolid State Technology
Volume41
Issue number4
Publication statusPublished - Apr 1998

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Gotlinsky, B., O'Sullivan, J., Shadman, F., Horikoshi, M., & Babasaki, S. (1998). PPT purification eliminates process variables. Solid State Technology, 41(4), 67-74.