Precision flexure stage utilizing parasitic motion

Ethan D. Burnham-Fay, Richard Smith, Steve G. Gillmer, Jonathan D. Ellis

Research output: Contribution to conferencePaper

Original languageEnglish (US)
Pages288-291
Number of pages4
Publication statusPublished - Dec 1 2012
Externally publishedYes
Event27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 - San Diego, CA, United States
Duration: Oct 21 2012Oct 26 2012

Conference

Conference27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012
CountryUnited States
CitySan Diego, CA
Period10/21/1210/26/12

ASJC Scopus subject areas

  • Engineering (miscellaneous)

Cite this

Burnham-Fay, E. D., Smith, R., Gillmer, S. G., & Ellis, J. D. (2012). Precision flexure stage utilizing parasitic motion. 288-291. Paper presented at 27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012, San Diego, CA, United States.