Preface—JSS focus issue on CMP for sub-10 nm technologies

Ara Philipossian, Jin Goo Park

Research output: Contribution to journalEditorial

Original languageEnglish (US)
Pages (from-to)Y1
JournalECS Journal of Solid State Science and Technology
Volume8
Issue number5
DOIs
StatePublished - Jan 1 2019

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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