Problems in quantitation in x-ray photoelectron spectroscopy (xps): The use of data reduction techniques to obtain peak areas

B. L. Maschhoff, K. R. Zavadil, K. W. Nebesny, J. W. Fordemwalt, N. R. Armstrong

Research output: Contribution to journalArticle

Abstract

Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.

Original languageEnglish (US)
Pages (from-to)112-123
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume690
DOIs
StatePublished - Aug 12 1986

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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