PROBLEMS IN QUANTITATION IN X-RAY PHOTOELECTRON SPECTROSCOPY (XPS)

THE USE OF DATA REDUCTION TECHNIQUES TO OBTAIN PEAK AREAS.

B. L. Maschhoff, K. R. Zavadil, K. W. Nebesny, J. W. Fordemwalt, Neal R Armstrong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Pages112-121
Number of pages10
Volume690
ISBN (Print)0892527250
StatePublished - 1986

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data reduction
Deconvolution
x ray spectroscopy
Data reduction
Energy dissipation
X ray photoelectron spectroscopy
energy dissipation
photoelectron spectroscopy
Core levels
curve fitting
Curve fitting
Metals
metals
electron energy
Electrons
causes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Maschhoff, B. L., Zavadil, K. R., Nebesny, K. W., Fordemwalt, J. W., & Armstrong, N. R. (1986). PROBLEMS IN QUANTITATION IN X-RAY PHOTOELECTRON SPECTROSCOPY (XPS): THE USE OF DATA REDUCTION TECHNIQUES TO OBTAIN PEAK AREAS. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 690, pp. 112-121). SPIE.

PROBLEMS IN QUANTITATION IN X-RAY PHOTOELECTRON SPECTROSCOPY (XPS) : THE USE OF DATA REDUCTION TECHNIQUES TO OBTAIN PEAK AREAS. / Maschhoff, B. L.; Zavadil, K. R.; Nebesny, K. W.; Fordemwalt, J. W.; Armstrong, Neal R.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 690 SPIE, 1986. p. 112-121.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Maschhoff, BL, Zavadil, KR, Nebesny, KW, Fordemwalt, JW & Armstrong, NR 1986, PROBLEMS IN QUANTITATION IN X-RAY PHOTOELECTRON SPECTROSCOPY (XPS): THE USE OF DATA REDUCTION TECHNIQUES TO OBTAIN PEAK AREAS. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 690, SPIE, pp. 112-121.
Maschhoff BL, Zavadil KR, Nebesny KW, Fordemwalt JW, Armstrong NR. PROBLEMS IN QUANTITATION IN X-RAY PHOTOELECTRON SPECTROSCOPY (XPS): THE USE OF DATA REDUCTION TECHNIQUES TO OBTAIN PEAK AREAS. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 690. SPIE. 1986. p. 112-121
Maschhoff, B. L. ; Zavadil, K. R. ; Nebesny, K. W. ; Fordemwalt, J. W. ; Armstrong, Neal R. / PROBLEMS IN QUANTITATION IN X-RAY PHOTOELECTRON SPECTROSCOPY (XPS) : THE USE OF DATA REDUCTION TECHNIQUES TO OBTAIN PEAK AREAS. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 690 SPIE, 1986. pp. 112-121
@inproceedings{579ba58070a74adc990a5dee786b9c71,
title = "PROBLEMS IN QUANTITATION IN X-RAY PHOTOELECTRON SPECTROSCOPY (XPS): THE USE OF DATA REDUCTION TECHNIQUES TO OBTAIN PEAK AREAS.",
abstract = "Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.",
author = "Maschhoff, {B. L.} and Zavadil, {K. R.} and Nebesny, {K. W.} and Fordemwalt, {J. W.} and Armstrong, {Neal R}",
year = "1986",
language = "English (US)",
isbn = "0892527250",
volume = "690",
pages = "112--121",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",

}

TY - GEN

T1 - PROBLEMS IN QUANTITATION IN X-RAY PHOTOELECTRON SPECTROSCOPY (XPS)

T2 - THE USE OF DATA REDUCTION TECHNIQUES TO OBTAIN PEAK AREAS.

AU - Maschhoff, B. L.

AU - Zavadil, K. R.

AU - Nebesny, K. W.

AU - Fordemwalt, J. W.

AU - Armstrong, Neal R

PY - 1986

Y1 - 1986

N2 - Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.

AB - Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.

UR - http://www.scopus.com/inward/record.url?scp=0022991215&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0022991215&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0892527250

VL - 690

SP - 112

EP - 121

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - SPIE

ER -