Processing challenges in the fabrication of advanced MEMS

A. Kornblit, V. A. Aksyuk, G. R. Bogart, C. Bolle, J. E. Bower, R. A. Cirelli, E. Ferry, L. Fetter, A. Gasparyan, D. S. Greywall, R. C. Keller, F. P. Klemens, W. Y.C. Lai, O. D. Lopez, W. M. Mansfield, J. F. Miner, C. S. Pai, F. Pardo, S. Pau, M. E. SimonT. Sorsch, J. A. Taylor, D. M. Tennant, G. P. Watson

Research output: Contribution to conferencePaper

1 Scopus citations

Abstract

As higher performance and complexity is demanded from advanced MEMS, the processes required to fabricate them are becoming much more demanding. Sub-micron features, rarely found in early MEMS, are now needed for unproved performance. Advanced processes, relying on tools that are available for high-performance ICs, can be used to achieve the desired functionality of advanced MEMS. This paper focuses mainly on devices in the optical domain, but the techniques to fabricate them are common to all MEMS.

Original languageEnglish (US)
Pages11-25
Number of pages15
StatePublished - 2004
EventMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States
Duration: Oct 3 2004Oct 8 2004

Other

OtherMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium
CountryUnited States
CityHonolulu, HI
Period10/3/0410/8/04

ASJC Scopus subject areas

  • Engineering(all)

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    Kornblit, A., Aksyuk, V. A., Bogart, G. R., Bolle, C., Bower, J. E., Cirelli, R. A., Ferry, E., Fetter, L., Gasparyan, A., Greywall, D. S., Keller, R. C., Klemens, F. P., Lai, W. Y. C., Lopez, O. D., Mansfield, W. M., Miner, J. F., Pai, C. S., Pardo, F., Pau, S., ... Watson, G. P. (2004). Processing challenges in the fabrication of advanced MEMS. 11-25. Paper presented at Microfabricated Systems and MEMS VII - Proceedings of the International Symposium, Honolulu, HI, United States.