Processing challenges in the fabrication of advanced MEMS

A. Kornblit, V. A. Aksyuk, G. R. Bogart, C. Bolle, J. E. Bower, R. A. Cirelli, E. Ferry, L. Fetter, A. Gasparyan, D. S. Greywall, R. C. Keller, F. P. Klemens, W. Y C Lai, O. D. Lopez, W. M. Mansfield, J. F. Miner, C. S. Pai, F. Pardo, Stanley K H Pau, M. E. SimonT. Sorsch, J. A. Taylor, D. M. Tennant, G. P. Watson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

As higher performance and complexity is demanded from advanced MEMS, the processes required to fabricate them are becoming much more demanding. Sub-micron features, rarely found in early MEMS, are now needed for unproved performance. Advanced processes, relying on tools that are available for high-performance ICs, can be used to achieve the desired functionality of advanced MEMS. This paper focuses mainly on devices in the optical domain, but the techniques to fabricate them are common to all MEMS.

Original languageEnglish (US)
Title of host publicationProceedings - Electrochemical Society
EditorsJ.L. Davidson, P.J. Hesketh, D. Misra, S. Shoji
Pages11-25
Number of pages15
Volume9
StatePublished - 2004
Externally publishedYes
EventMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States
Duration: Oct 3 2004Oct 8 2004

Other

OtherMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium
CountryUnited States
CityHonolulu, HI
Period10/3/0410/8/04

Fingerprint

MEMS
Fabrication
Processing

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kornblit, A., Aksyuk, V. A., Bogart, G. R., Bolle, C., Bower, J. E., Cirelli, R. A., ... Watson, G. P. (2004). Processing challenges in the fabrication of advanced MEMS. In J. L. Davidson, P. J. Hesketh, D. Misra, & S. Shoji (Eds.), Proceedings - Electrochemical Society (Vol. 9, pp. 11-25)

Processing challenges in the fabrication of advanced MEMS. / Kornblit, A.; Aksyuk, V. A.; Bogart, G. R.; Bolle, C.; Bower, J. E.; Cirelli, R. A.; Ferry, E.; Fetter, L.; Gasparyan, A.; Greywall, D. S.; Keller, R. C.; Klemens, F. P.; Lai, W. Y C; Lopez, O. D.; Mansfield, W. M.; Miner, J. F.; Pai, C. S.; Pardo, F.; Pau, Stanley K H; Simon, M. E.; Sorsch, T.; Taylor, J. A.; Tennant, D. M.; Watson, G. P.

Proceedings - Electrochemical Society. ed. / J.L. Davidson; P.J. Hesketh; D. Misra; S. Shoji. Vol. 9 2004. p. 11-25.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kornblit, A, Aksyuk, VA, Bogart, GR, Bolle, C, Bower, JE, Cirelli, RA, Ferry, E, Fetter, L, Gasparyan, A, Greywall, DS, Keller, RC, Klemens, FP, Lai, WYC, Lopez, OD, Mansfield, WM, Miner, JF, Pai, CS, Pardo, F, Pau, SKH, Simon, ME, Sorsch, T, Taylor, JA, Tennant, DM & Watson, GP 2004, Processing challenges in the fabrication of advanced MEMS. in JL Davidson, PJ Hesketh, D Misra & S Shoji (eds), Proceedings - Electrochemical Society. vol. 9, pp. 11-25, Microfabricated Systems and MEMS VII - Proceedings of the International Symposium, Honolulu, HI, United States, 10/3/04.
Kornblit A, Aksyuk VA, Bogart GR, Bolle C, Bower JE, Cirelli RA et al. Processing challenges in the fabrication of advanced MEMS. In Davidson JL, Hesketh PJ, Misra D, Shoji S, editors, Proceedings - Electrochemical Society. Vol. 9. 2004. p. 11-25
Kornblit, A. ; Aksyuk, V. A. ; Bogart, G. R. ; Bolle, C. ; Bower, J. E. ; Cirelli, R. A. ; Ferry, E. ; Fetter, L. ; Gasparyan, A. ; Greywall, D. S. ; Keller, R. C. ; Klemens, F. P. ; Lai, W. Y C ; Lopez, O. D. ; Mansfield, W. M. ; Miner, J. F. ; Pai, C. S. ; Pardo, F. ; Pau, Stanley K H ; Simon, M. E. ; Sorsch, T. ; Taylor, J. A. ; Tennant, D. M. ; Watson, G. P. / Processing challenges in the fabrication of advanced MEMS. Proceedings - Electrochemical Society. editor / J.L. Davidson ; P.J. Hesketh ; D. Misra ; S. Shoji. Vol. 9 2004. pp. 11-25
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