Processing of back illuminated 4096×4096 Fairchild CCDs at the University of Arizona

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The University of Arizona Imaging Technology Laboratory has processed 4096×4096 15-micron Charge Coupled Devices (CCDs) fabricated at Lockheed Martin Fairchild Systems for back illuminated scientific applications. The devices have been optimized for astronomical observations in a direct imaging mode. Three types of back illuminated devices have been developed. The oldest devices are CCD4096JJ detectors which were custom fabricated for astronomical applications. The CCD485 devices are commercial sensors, originally fabricated for digital photography and medical applications. Because no frontside ground contact was included on either device, a backside contact was developed and applied as part of the backside processing. With this addition, very high quality back illuminated sensors have been developed. The CCD486 is a newer version of the 4k×4k CCD with low noise amplifiers and a backside contact. These sensors have now been produced back illuminated with >90% QE and read noise under 4 elec trons. The devices show CTE of >0.999998. Back illuminated versions CCDs have been fabricated with peak-valley flatness non-uniformity of less than 10 microns. A new epoxy underfill technique was developed to achieve this flatness and to avoid underfill voiding during epoxy application and curing. The new method applies a contact force on the CCD during the entire 48 hour cure cycle.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsM.M. Blouke, J. Canosa, N. Sampat
Pages196-204
Number of pages9
Volume4306
DOIs
StatePublished - 2001
EventSensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications II - San Jose, CA, United States
Duration: Jan 22 2001Jan 24 2001

Other

OtherSensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications II
CountryUnited States
CitySan Jose, CA
Period1/22/011/24/01

Fingerprint

Charge coupled devices
charge coupled devices
Processing
Sensors
flatness
Imaging techniques
Low noise amplifiers
sensors
Photography
Medical applications
Curing
photography
curing
Detectors
nonuniformity
low noise
valleys
amplifiers
cycles
detectors

Keywords

  • Astronomy
  • CCD
  • Charge-coupled Device
  • Detectors
  • Silicon
  • Thin films

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Lesser, M. P., & Vu, P. (2001). Processing of back illuminated 4096×4096 Fairchild CCDs at the University of Arizona. In M. M. Blouke, J. Canosa, & N. Sampat (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4306, pp. 196-204) https://doi.org/10.1117/12.426955

Processing of back illuminated 4096×4096 Fairchild CCDs at the University of Arizona. / Lesser, Michael P; Vu, P.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / M.M. Blouke; J. Canosa; N. Sampat. Vol. 4306 2001. p. 196-204.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lesser, MP & Vu, P 2001, Processing of back illuminated 4096×4096 Fairchild CCDs at the University of Arizona. in MM Blouke, J Canosa & N Sampat (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4306, pp. 196-204, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications II, San Jose, CA, United States, 1/22/01. https://doi.org/10.1117/12.426955
Lesser MP, Vu P. Processing of back illuminated 4096×4096 Fairchild CCDs at the University of Arizona. In Blouke MM, Canosa J, Sampat N, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4306. 2001. p. 196-204 https://doi.org/10.1117/12.426955
Lesser, Michael P ; Vu, P. / Processing of back illuminated 4096×4096 Fairchild CCDs at the University of Arizona. Proceedings of SPIE - The International Society for Optical Engineering. editor / M.M. Blouke ; J. Canosa ; N. Sampat. Vol. 4306 2001. pp. 196-204
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