Processing parameter optimization for thermochemical writing of DOEs on chromium films

Vadim V. Cherkashin, Evgeny G. Churin, Victor P. Korol'kov, Voldemar P. Koronkevich, Andrey A. Kharissov, Alexander G. Poleshchuk, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

36 Scopus citations

Abstract

Computer-generated holograms are limited by conventional lithographic fabrication capabilities which rely on accurate deposition, exposure, and developing of photosensitive chemicals. We present an alternate fabrication technology that uses a focused laser beam to write patterns by inducing a thermochemical change in a bare metal film. The patterns are developed using a single etching step that dissolves the non- exposed metal. The thermochemical writing method allows holograms to be directly written onto large-diameter, thick, and non-flat substrates, requiring no intermediate steps that compromise the ultimate accuracy. Circular patterns for optical testing were written using a polar-coordinate laser writer. The laser power and control requirements are shown to be modest and the etching is shown to be tolerant of temperature and concentration variations. The technology is demonstrated with the fabrication of CGHs up to 136 mm in diameter used for optical testing.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages168-179
Number of pages12
ISBN (Print)0819424218
StatePublished - Dec 1 1997
EventDiffractive and Holographic Device Technologies and Applications IV - San Jose, CA, USA
Duration: Feb 12 1997Feb 13 1997

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume3010
ISSN (Print)0277-786X

Other

OtherDiffractive and Holographic Device Technologies and Applications IV
CitySan Jose, CA, USA
Period2/12/972/13/97

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Cherkashin, V. V., Churin, E. G., Korol'kov, V. P., Koronkevich, V. P., Kharissov, A. A., Poleshchuk, A. G., & Burge, J. H. (1997). Processing parameter optimization for thermochemical writing of DOEs on chromium films. In Proceedings of SPIE - The International Society for Optical Engineering (pp. 168-179). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 3010). Society of Photo-Optical Instrumentation Engineers.