Properties of multilayers for soft X-ray optics

Charles M Falco, Felix E. Fernandez, P. Dhez, A. Khandar-Shahabad

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Appropriate physical description of multilayer structures to be used as soft x-ray optical elements is necessary to ensure agreement of predicted and actual performance. Deviations of the fabricated structures from an ideal design (interfacial roughness and diffusion, microvoids, impurities, thickness errors) degrade the reflectance properties. In addition, deviations of the physical properties of very thin films from those of the bulk materials can limit the validity of reflectance calculations. We describe these difficulties and how a particular fabrication-characterization procedure can help solve them. Characterization techniques used include a variety of x-ray diffraction techniques, Rutherford Backscattering Spectroscopy and Transmission Electron Microscopy. Examples of results obtained for samples prepared by triode magnetically confined dc sputtering will be given, as will a discussion of the implication of these results for other multilayer materials.

Original languageEnglish (US)
Pages (from-to)51-53
Number of pages3
JournalSuperlattices and Microstructures
Volume4
Issue number1
DOIs
StatePublished - 1988

Fingerprint

X ray optics
geometrical optics
Multilayers
deviation
reflectance
Triodes
X rays
triodes
Rutherford backscattering spectroscopy
Optical devices
laminates
Sputtering
backscattering
x ray diffraction
x rays
roughness
Physical properties
Diffraction
physical properties
sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Properties of multilayers for soft X-ray optics. / Falco, Charles M; Fernandez, Felix E.; Dhez, P.; Khandar-Shahabad, A.

In: Superlattices and Microstructures, Vol. 4, No. 1, 1988, p. 51-53.

Research output: Contribution to journalArticle

Falco, Charles M ; Fernandez, Felix E. ; Dhez, P. ; Khandar-Shahabad, A. / Properties of multilayers for soft X-ray optics. In: Superlattices and Microstructures. 1988 ; Vol. 4, No. 1. pp. 51-53.
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