Prototype results of a phase-shifting interferometer capable of measuring the complex index and profile of a test surface

Eric W. Rogala, Harrison H. Barrett

Research output: Contribution to journalArticlepeer-review

Abstract

Results are presented from a prototype phase-shifting interferometer capable of measuring both the real and the imaginary part of the complex index of refraction and the surface profile of a test surface. The three parameters of interest are extracted from the measured data by maximum-likelihood estimation theory. The performance of the system is quantitatively assessed with Cramer–Rao lower bounds. The results are shown to be strongly dependent on the quantization of the interferograms from the 8-bit CCD camera, the incident electric field amplitude, and the relative amplitude and phase difference of each polarized component through each arm of the interferometer.

Original languageEnglish (US)
Pages (from-to)5298-5312
Number of pages15
JournalApplied optics
Volume41
Issue number25
DOIs
StatePublished - Sep 1 2002

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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