Prototype results of a phase-shifting interferometer capable of measuring the complex index and profile of a test surface

Eric W. Rogala, Harrison H Barrett

Research output: Contribution to journalArticle

Abstract

Results are presented from a prototype phase-shifting interferometer capable of measuring both the real and the imaginary part of the complexindex of refraction and the surface profile of a test surface. The three parameters of interest are extracted from the measured data by maximum-likelihood estimation theory. The performance of the system is quantitatively assessed with Cramer-Rao lower bounds. The results are shown to be strongly dependent on the quantization of the interferograms from the 8-bit CCD camera, the incident electric field amplitude, and the relative amplitude and phase difference of each polarized component through each arm of the interferometer.

Original languageEnglish (US)
Pages (from-to)5298-5312
Number of pages15
JournalApplied Optics
Volume41
Issue number25
StatePublished - Sep 1 2002

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Interferometers
interferometers
prototypes
Maximum likelihood estimation
CCD cameras
profiles
Refraction
refraction
interferometry
Electric fields
electric fields

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Prototype results of a phase-shifting interferometer capable of measuring the complex index and profile of a test surface. / Rogala, Eric W.; Barrett, Harrison H.

In: Applied Optics, Vol. 41, No. 25, 01.09.2002, p. 5298-5312.

Research output: Contribution to journalArticle

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