Pyroelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios

G. Teowee, F. S. McCarthy, K. C. McCarthy, B. H. Dietz, Donald R Uhlmann

Research output: Chapter in Book/Report/Conference proceedingChapter

6 Citations (Scopus)

Abstract

Integrated pyroelectric arrays are receiving serious attention for the next generation of room temperature uncooled IR cameras. Such pyroelectric arrays are based on monolithic ferroelectric(FE) thin films. FE films with large values of reported pyroelectric coefficients include PbTiO3, Ca-doped PbTiO3, La-doped PbTiO3, PZT 53/47 and Pb(Sc0.5Ta0.5)O3. The present paper reports a systematic study of the compositional dependence of PZT thin films on their pyroelectric properties. A series of sol-gel derived PZT (lead zirconate titanate) thin films with various Zr/Ti ratios, namely, PbTiO3, PZT 20/80, PZT 35/65, PZT 53/47, PZT 65/35, PZT 92/8 and PbZrO3, were prepared on platinized Si substrates. The films were fired to 650-700°C to crystallize them into single-phase perovskite. The degree of preferred orientation, grain size and firing temperature affect the pyroelectric responses. Pyroelectric coefficients as large as 2.5 × 10-8 C/cm2-K were obtained, making such PZT thin films attractive in pyroelectric arrays.

Original languageEnglish (US)
Title of host publicationIntegrated Ferroelectrics
Pages431-438
Number of pages8
Volume22
Edition1-4
StatePublished - 1998

Fingerprint

Sol-gels
gels
Thin films
thin films
Ferroelectric films
Ferroelectric thin films
Perovskite
coefficients
Cameras
Temperature
grain size
cameras
Substrates
room temperature
temperature
lead titanate zirconate
perovskite

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Teowee, G., McCarthy, F. S., McCarthy, K. C., Dietz, B. H., & Uhlmann, D. R. (1998). Pyroelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. In Integrated Ferroelectrics (1-4 ed., Vol. 22, pp. 431-438)

Pyroelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. / Teowee, G.; McCarthy, F. S.; McCarthy, K. C.; Dietz, B. H.; Uhlmann, Donald R.

Integrated Ferroelectrics. Vol. 22 1-4. ed. 1998. p. 431-438.

Research output: Chapter in Book/Report/Conference proceedingChapter

Teowee, G, McCarthy, FS, McCarthy, KC, Dietz, BH & Uhlmann, DR 1998, Pyroelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. in Integrated Ferroelectrics. 1-4 edn, vol. 22, pp. 431-438.
Teowee G, McCarthy FS, McCarthy KC, Dietz BH, Uhlmann DR. Pyroelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. In Integrated Ferroelectrics. 1-4 ed. Vol. 22. 1998. p. 431-438
Teowee, G. ; McCarthy, F. S. ; McCarthy, K. C. ; Dietz, B. H. ; Uhlmann, Donald R. / Pyroelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. Integrated Ferroelectrics. Vol. 22 1-4. ed. 1998. pp. 431-438
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