Pyroelectric properties of various sol-gel derived PLZT thin films

K. C. Mccarthy, F. S. Mccarthy, G. Teowee, T. J. Bukowski, T. P. Alexander, D. R. Uhlmann

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

Pyroelectric IR imaging, especially based on monolithic technology integrated with semiconductors, is receiving increased attention for the next generation of room temperature uncooled IR cameras. In the present work, sol-gel derived PZT, including PbTiO3, PLT 28, PLZT 9/65/35, and PZT 53/47, films were prepared on platinized Si substrates. Their pyroelectric properties were determined, and are discussed with respect to film microstructures, processing, and chemistries. Pyroelectric coefficients as large as 7.7×10-8 C/cm2-K, were obtained for PZT 53/47 films.

Original languageEnglish (US)
Pages (from-to)377-385
Number of pages9
JournalIntegrated Ferroelectrics
Volume17
Issue number1-4
DOIs
StatePublished - Jan 1 1997

Keywords

  • Ferroelectric
  • Pyroelectric coefficient
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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