Quantitative Auger and XPS Analysis of Thin Films

J. M. Slaughter, W. Weber, Gernot Güntherodt, Charles M. Falco

Research output: Contribution to journalArticlepeer-review

15 Scopus citations
Original languageEnglish (US)
Pages (from-to)39-45
Number of pages7
JournalMRS Bulletin
Issue number12
StatePublished - Dec 1992

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

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