Quantitative Auger and XPS Analysis of Thin Films

J. M. Slaughter, W. Weber, Gernot Güntherodt, Charles M Falco

Research output: Contribution to journalArticle

15 Citations (Scopus)
Original languageEnglish (US)
Pages (from-to)39-45
Number of pages7
JournalMRS Bulletin
Volume17
Issue number12
DOIs
StatePublished - 1992
Externally publishedYes

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X ray photoelectron spectroscopy
Thin films
thin films

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this

Quantitative Auger and XPS Analysis of Thin Films. / Slaughter, J. M.; Weber, W.; Güntherodt, Gernot; Falco, Charles M.

In: MRS Bulletin, Vol. 17, No. 12, 1992, p. 39-45.

Research output: Contribution to journalArticle

Slaughter, JM, Weber, W, Güntherodt, G & Falco, CM 1992, 'Quantitative Auger and XPS Analysis of Thin Films', MRS Bulletin, vol. 17, no. 12, pp. 39-45. https://doi.org/10.1557/S0883769400046947
Slaughter, J. M. ; Weber, W. ; Güntherodt, Gernot ; Falco, Charles M. / Quantitative Auger and XPS Analysis of Thin Films. In: MRS Bulletin. 1992 ; Vol. 17, No. 12. pp. 39-45.
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