Quantitative Auger electron spectroscopy and Rutherford backscattering of potassium-implanted silicon, silica and sodium trisilicate

Brad J. Burrow, Neal R Armstrong, Rod K. Quinn, Bruce C. Bunker, George W. Arnold, Doug R. Salmi

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Samples of silicon, silica, and sodium trisilicate, which were ion implanted with potassium, were analyzed by Auger Electron Spectroscopy (AES) and Rutherford Backscattering Spectroscopy (RBS). Depth profiles obtained by both techniques showed that approximately 50% of the implanted potassium migrated from the subsurface implant region to the surface for both the silica and sodium trisilicate samples. Less migration was detected for the silicon samples. Analyses of the results suggest that some of the ion migration observed in Auger depth profiles is induced by the analysis technique. With this exception, it is demonstrated that a combination of AES and RBS techniques can provide quantitative compositional analyses for altered glass surfaces.

Original languageEnglish (US)
Pages (from-to)167-180
Number of pages14
JournalApplied Surface Science
Volume20
Issue number1-2
StatePublished - Dec 1984

Fingerprint

Rutherford backscattering spectroscopy
Silicon
Auger electron spectroscopy
Silicon Dioxide
Auger spectroscopy
electron spectroscopy
Potassium
potassium
backscattering
Sodium
Silica
sodium
Ions
silicon dioxide
silicon
profiles
Glass
spectroscopy
ions
glass

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Physical and Theoretical Chemistry
  • Engineering(all)

Cite this

Quantitative Auger electron spectroscopy and Rutherford backscattering of potassium-implanted silicon, silica and sodium trisilicate. / Burrow, Brad J.; Armstrong, Neal R; Quinn, Rod K.; Bunker, Bruce C.; Arnold, George W.; Salmi, Doug R.

In: Applied Surface Science, Vol. 20, No. 1-2, 12.1984, p. 167-180.

Research output: Contribution to journalArticle

Burrow, Brad J. ; Armstrong, Neal R ; Quinn, Rod K. ; Bunker, Bruce C. ; Arnold, George W. ; Salmi, Doug R. / Quantitative Auger electron spectroscopy and Rutherford backscattering of potassium-implanted silicon, silica and sodium trisilicate. In: Applied Surface Science. 1984 ; Vol. 20, No. 1-2. pp. 167-180.
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AU - Arnold, George W.

AU - Salmi, Doug R.

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