Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies

Yu Zhang, Xiaobo Tian, Rongguang Liang

Research output: Contribution to journalArticle

17 Scopus citations

Abstract

To accurately obtain the phase distribution of an optical surface under test, the accurate phase extraction algorithm is essential. To overcome the phase shift error, a random two-step phase shifting algorithm, which can be used in the fluctuating and non-uniform background intensity and modulation amplitude, Lissajous ellipse fitting, and least squares iterative phase shifting algorithm (LEF&LSI PSA), is proposed; pre-filtering interferograms are not necessary, but they can get relatively accurate phase distribution and unknown phase shift value. The simulation and experiment verify the correctness and feasibility of the LEF & LSI PSA.

Original languageEnglish (US)
Pages (from-to)15059-15072
Number of pages14
JournalOptics Express
Volume26
Issue number12
DOIs
StatePublished - Jun 11 2018

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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