Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies

Yu Zhang, Xiaobo Tian, Rongguang Liang

Research output: Contribution to journalArticlepeer-review

24 Scopus citations

Abstract

To accurately obtain the phase distribution of an optical surface under test, the accurate phase extraction algorithm is essential. To overcome the phase shift error, a random two-step phase shifting algorithm, which can be used in the fluctuating and non-uniform background intensity and modulation amplitude, Lissajous ellipse fitting, and least squares iterative phase shifting algorithm (LEF&LSI PSA), is proposed; pre-filtering interferograms are not necessary, but they can get relatively accurate phase distribution and unknown phase shift value. The simulation and experiment verify the correctness and feasibility of the LEF & LSI PSA.

Original languageEnglish (US)
Pages (from-to)15059-15072
Number of pages14
JournalOptics Express
Volume26
Issue number12
DOIs
StatePublished - Jun 11 2018

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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