Reaction of aqueous tetramethylammonium sulfide on SiGe(100) 25% as a function of pH

Zhonghao Zhang, A. J. Muscat

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Tetramethylammonium sulfide [(CH3)4N]2S dissociates in water yielding tetramethylammonium cation, which does not hydrolyze, and sulfide anion (S2-), which undergoes hydrolysis reactions forming HS- and H2S. The reaction of these three sources of S with the surface of SiGe(lOO) 25% was investigated by X-ray photoelectron spectroscopy (XPS), temperature programmed desorption (TPD), and a speciation model as a function of pH. Lowering the pH of dilute aqueous TMAS increased the H2S concentration and the S coverage on the surface increased in tandem. Covalent Ge-S bonds formed, and the highest S/elemental Ge molar ratio was 0.66 at pH 2-3. The surface termination was mixed, that is H-SiGe-SH. H2S desorbed in a state with a peak temperature at about 550 K and GeS in a peak at about 600 K. The Ge atoms on the SiGe surface were preferentially oxidized in aqueous TMAS based on the O/Si and Ge13+/Ge molar ratios calculated from XPS data compared to control surfaces.

Original languageEnglish (US)
Title of host publication16th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2019
EditorsKoichiro Saga, Paul W. Mertens, Takeshi Hattori, Jerzy Ruzyllo, Anthony J. Muscat
PublisherElectrochemical Society Inc.
Pages47-56
Number of pages10
Edition2
ISBN (Electronic)9781607685395
DOIs
StatePublished - Jan 1 2019
Event16th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2019 - 236th ECS Meeting - Atlanta, United States
Duration: Oct 13 2019Oct 17 2019

Publication series

NameECS Transactions
Number2
Volume92
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Conference

Conference16th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2019 - 236th ECS Meeting
CountryUnited States
CityAtlanta
Period10/13/1910/17/19

    Fingerprint

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Zhang, Z., & Muscat, A. J. (2019). Reaction of aqueous tetramethylammonium sulfide on SiGe(100) 25% as a function of pH. In K. Saga, P. W. Mertens, T. Hattori, J. Ruzyllo, & A. J. Muscat (Eds.), 16th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2019 (2 ed., pp. 47-56). (ECS Transactions; Vol. 92, No. 2). Electrochemical Society Inc.. https://doi.org/10.1149/09202.0047ecst