Abstract
This paper summarizes the benefits and risks associated with water re-use and recycling in the semiconductor industry. The specific items that will be covered in this paper are: characterization of the spent rinse-water types, the composition range of key impurities, different recycling strategies, and water conservation methods. Discussion will include the development of new purification methods for the removal of organic impurities, and the development of a computer model for simulating the effects of recycle.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 263-267 |
| Number of pages | 5 |
| Journal | Environmental Progress |
| Volume | 16 |
| Issue number | 4 |
| DOIs | |
| State | Published - Jan 1 1997 |
ASJC Scopus subject areas
- Environmental Science(all)
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Degenova, J., & Shadman, F. (1997). Recovery, reuse, and recycle of water in semiconductor wafer fabrication facilities. Environmental Progress, 16(4), 263-267. https://doi.org/10.1002/ep.3300160414