Recovery, reuse, and recycle of water in semiconductor wafer fabrication facilities

John Degenova, Farhang Shadman

Research output: Contribution to journalArticle

15 Scopus citations

Abstract

This paper summarizes the benefits and risks associated with water re-use and recycling in the semiconductor industry. The specific items that will be covered in this paper are: characterization of the spent rinse-water types, the composition range of key impurities, different recycling strategies, and water conservation methods. Discussion will include the development of new purification methods for the removal of organic impurities, and the development of a computer model for simulating the effects of recycle.

Original languageEnglish (US)
Pages (from-to)263-267
Number of pages5
JournalEnvironmental Progress
Volume16
Issue number4
DOIs
StatePublished - Jan 1 1997

ASJC Scopus subject areas

  • Environmental Science(all)

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