TY - JOUR
T1 - Recovery, reuse, and recycle of water in semiconductor wafer fabrication facilities
AU - Degenova, John
AU - Shadman, Farhang
PY - 1997/1/1
Y1 - 1997/1/1
N2 - This paper summarizes the benefits and risks associated with water re-use and recycling in the semiconductor industry. The specific items that will be covered in this paper are: characterization of the spent rinse-water types, the composition range of key impurities, different recycling strategies, and water conservation methods. Discussion will include the development of new purification methods for the removal of organic impurities, and the development of a computer model for simulating the effects of recycle.
AB - This paper summarizes the benefits and risks associated with water re-use and recycling in the semiconductor industry. The specific items that will be covered in this paper are: characterization of the spent rinse-water types, the composition range of key impurities, different recycling strategies, and water conservation methods. Discussion will include the development of new purification methods for the removal of organic impurities, and the development of a computer model for simulating the effects of recycle.
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U2 - 10.1002/ep.3300160414
DO - 10.1002/ep.3300160414
M3 - Article
AN - SCOPUS:0031359856
VL - 16
SP - 263
EP - 267
JO - Environmental Progress and Sustainable Energy
JF - Environmental Progress and Sustainable Energy
SN - 1944-7442
IS - 4
ER -