Regularized model of post-touchdown configurations in electrostatic MEMS: Equilibrium analysis

A. E. Lindsay, J. Lega, K. B. Glasner

Research output: Contribution to journalArticle

14 Scopus citations

Abstract

In canonical models of Micro-Electro Mechanical Systems (MEMS), an event called touchdown whereby the electrical components of the device come into contact, is characterized by a blow up in the governing equations and a non-physical divergence of the electric field. In the present work, we propose novel regularized governing equations whose solutions remain finite at touchdown and exhibit additional dynamics beyond this initial event before eventually relaxing to new stable equilibria. We employ techniques from variational calculus, dynamical systems and singular perturbation theory to obtain a detailed understanding of the properties and equilibrium solutions of the regularized family of equations.

Original languageEnglish (US)
Pages (from-to)95-108
Number of pages14
JournalPhysica D: Nonlinear Phenomena
Volume280-281
DOIs
StatePublished - Jul 1 2014

Keywords

  • Blow up
  • Higher order partial differential equations
  • Nano-technology
  • Regularization
  • Singular perturbation techniques

ASJC Scopus subject areas

  • Statistical and Nonlinear Physics
  • Mathematical Physics
  • Condensed Matter Physics
  • Applied Mathematics

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