Removal of gold particles from chromium oxynitride surface with dilute sulfuric acid solutions

V. Pandit, M. Keswani, S. Raghavan, K. Muralidharan, P. Deymier, F. Eshbach, A. Sengupta, H. Yun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Removal of gold particles (100 nm) from chromium oxynitride surface (CrON) has been investigated using dilute sulfuric acid solutions. Two types of gold nano-particles, one with a negative surface charge and the other with a positive charge achieved by adsorption of poly diallyl-dimethyl ammonium chloride (PDAC), were used. Particle removal efficiency (PRE) increases with sulfuric acid concentration and bath temperature. In 1:10 H2SO4:DI solution, increasing the bath temperature from 25 to 100°C increases the PRE from 21 to 99 %. Introduction of megasonic energy at 0.43 W/cm2 in a 1:10 H2SO4:DI bath at 35°C increases the PRE to 88 %. PDAC coated gold particles are difficult to remove as compared to uncoated particles due to their electrostatic interaction with the surface leading to stronger adhesion.

Original languageEnglish (US)
Title of host publicationECS Transactions - 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing
Pages471-478
Number of pages8
Edition2
DOIs
StatePublished - Dec 1 2007
Event10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 212th ECS Meeting - Washington, DC, United States
Duration: Oct 7 2007Oct 12 2007

Publication series

NameECS Transactions
Number2
Volume11
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

Other10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 212th ECS Meeting
CountryUnited States
CityWashington, DC
Period10/7/0710/12/07

ASJC Scopus subject areas

  • Engineering(all)

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