Removal of gold particles from chromium oxynitride surface with dilute sulfuric acid solutions

V. Pandit, Manish K Keswani, Srini Raghavan, Krishna Muralidharan, Pierre A Deymier, F. Eshbach, A. Sengupta, H. Yun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Removal of gold particles (100 nm) from chromium oxynitride surface (CrON) has been investigated using dilute sulfuric acid solutions. Two types of gold nano-particles, one with a negative surface charge and the other with a positive charge achieved by adsorption of poly diallyl-dimethyl ammonium chloride (PDAC), were used. Particle removal efficiency (PRE) increases with sulfuric acid concentration and bath temperature. In 1:10 H2SO4:DI solution, increasing the bath temperature from 25 to 100°C increases the PRE from 21 to 99 %. Introduction of megasonic energy at 0.43 W/cm2 in a 1:10 H2SO4:DI bath at 35°C increases the PRE to 88 %. PDAC coated gold particles are difficult to remove as compared to uncoated particles due to their electrostatic interaction with the surface leading to stronger adhesion.

Original languageEnglish (US)
Title of host publicationECS Transactions
Pages471-478
Number of pages8
Volume11
Edition2
DOIs
StatePublished - 2007
Event10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 212th ECS Meeting - Washington, DC, United States
Duration: Oct 7 2007Oct 12 2007

Other

Other10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 212th ECS Meeting
CountryUnited States
CityWashington, DC
Period10/7/0710/12/07

Fingerprint

Sulfuric acid
Chromium
Gold
Surface charge
Coulomb interactions
Adhesion
Adsorption
Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Removal of gold particles from chromium oxynitride surface with dilute sulfuric acid solutions. / Pandit, V.; Keswani, Manish K; Raghavan, Srini; Muralidharan, Krishna; Deymier, Pierre A; Eshbach, F.; Sengupta, A.; Yun, H.

ECS Transactions. Vol. 11 2. ed. 2007. p. 471-478.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pandit, V, Keswani, MK, Raghavan, S, Muralidharan, K, Deymier, PA, Eshbach, F, Sengupta, A & Yun, H 2007, Removal of gold particles from chromium oxynitride surface with dilute sulfuric acid solutions. in ECS Transactions. 2 edn, vol. 11, pp. 471-478, 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 212th ECS Meeting, Washington, DC, United States, 10/7/07. https://doi.org/10.1149/1.2779412
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