Research Accomplishments at the University of Arizona SEMATECH Center of Excellence for Contamination/Defect Assessment and Control

Harold G. Parks, John F. O’Hanlon, Farhang Shadman

Research output: Contribution to journalArticle

Abstract

The Arizona SEMATECH Center of Excellence (SCOE) was established in May of 1988, is funded by SEMA-TECH and contractually monitored by the Semiconductor Research Corporation (SRC). The SCOE is engaged in research in a broad front to understand and control contamination which causes yield limiting defects in submicron ULSI circuits. Sandia National Laboratory personnel are integrated with UA personnel in the SCOE research. The focus of the research is on contaminants, both particulates and homogeneous or distributed, which originate in, are caused by, or are transported and deposited by process gases and chemicals or process equipment. Further, the work involves investigating the mapping from contaminants and contaminant levels to degradation of device properties. The resulting degradation in device properties can then be used to estimate the effects of such contaminants for submicron processes and circuits. Results achieved during the four years of the SCOE’s existence are describe in this paper.

Original languageEnglish (US)
Pages (from-to)134-142
Number of pages9
JournalIEEE Transactions on Semiconductor Manufacturing
Volume6
Issue number2
DOIs
StatePublished - May 1993

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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