Residual stress-loaded titanium-nickel shape-memory alloy thin-film micro-actuators

Rong Xin Wang, Yitshak Zohar, Man Wong

Research output: Contribution to journalArticle

32 Scopus citations

Abstract

Residual stress in titanium-nickel thin films has been exploited as a force load for thin-film shape-memory alloy micro-actuators, thus eliminating the need for providing 'external' force load for device training and operation. Thermal cycling during device operation is accomplished using electrical current-induced Joule's heating for temperature ramp-up and thermal conduction/convection-induced cooling for temperature ramp-down. In response to thermal cycling, hysteresis loops in both the displacement and electrical resistance of the micro-actuator have been observed - thus demonstrating the existence of shape-memory effect in the micro-actuators. Elimination of manual training of individual devices makes it possible to operate large arrays of shape-memory alloy micro-actuators realizable using micro-fabrication techniques.

Original languageEnglish (US)
Pages (from-to)323-327
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume12
Issue number3
DOIs
StatePublished - May 1 2002
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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