Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information

John E Greivenkamp, Kevin G. Sullivan, Russell J. Palum

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. This paper will explore the use of this a priori information in resolving the ambiguities found in interferometric step-height measurements. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.

Original languageEnglish (US)
Pages (from-to)84-79
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1164
DOIs
StatePublished - Dec 20 1989
Externally publishedYes

Fingerprint

ambiguity
Measurement Techniques
rangefinding
Interferometry
Process Parameters
interferometry
Experimental Results
Range of data
Ambiguity
Knowledge
Concepts

ASJC Scopus subject areas

  • Applied Mathematics
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Computer Science Applications

Cite this

Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information. / Greivenkamp, John E; Sullivan, Kevin G.; Palum, Russell J.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1164, 20.12.1989, p. 84-79.

Research output: Contribution to journalArticle

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