Resolving interferometric step height measurement ambiguities using a priori information

John E. Greivenkamp, Kevin G. Sullivan, Russell J. Palum

Research output: Contribution to journalConference articlepeer-review

Abstract

One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. This paper will explore the use of this a priori information in resolving the ambiguities found in interferometric step-height measurements. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.

Original languageEnglish (US)
Pages (from-to)79-84
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1164
DOIs
StatePublished - Dec 20 1989
Externally publishedYes
EventSurface Characterization and Testing II 1989 - San Diego, United States
Duration: Aug 7 1989Aug 11 1989

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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