Review-understanding and controlling electrochemical effects in wet processing

Srini Raghavan, C. C. Chiang

Research output: Contribution to journalReview articlepeer-review

1 Scopus citations

Abstract

Electrochemical techniques have long been used in understanding and improving the performance of various wet chemical processing steps such as etching, cleaning, passivation and rinsing used in integrated circuit (IC) manufacturing. The objective of this paper is to provide a few examples of how electrochemical techniques can be used to probe some important areas in wet processing. It is not intended to be an exhaustive review of techniques and problems reported in the literature.

Original languageEnglish (US)
Pages (from-to)P309-P314
JournalECS Journal of Solid State Science and Technology
Volume5
Issue number6
DOIs
StatePublished - 2016

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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