Scanning probe metrology in the presence of surface charge

J. E. Griffith, E. M. Kneedler, S. Ningen, A. Berghaus, C. E. Bryson, S. Pau, E. Houge, T. Shofner

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

The operation of a scanning force microscope that is relatively immune to charge-induced forces while allowing the probe tip to nondestructively follow the surface topography is discussed. A servoed force-balance sensor is incorporated in the instrument. The sensor responded to forces associated with the solid surfaces and not to the forces arising from charging or contamination.

Original languageEnglish (US)
Pages (from-to)3264-3267
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number6
DOIs
StatePublished - Nov 1 2000
Externally publishedYes
Event44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Rancho Mirage, CA, USA
Duration: May 30 2000Jun 2 2000

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    Griffith, J. E., Kneedler, E. M., Ningen, S., Berghaus, A., Bryson, C. E., Pau, S., Houge, E., & Shofner, T. (2000). Scanning probe metrology in the presence of surface charge. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 18(6), 3264-3267. https://doi.org/10.1116/1.1313586