Scots, an alternative to surface topographic interferometry

Peng Su, Robert E. Parks, Roger Angel, Lirong Wang, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010
Pages52-57
Number of pages6
StatePublished - Dec 1 2010
EventASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010 - Asheville, NC, United States
Duration: Jun 23 2010Jun 25 2010

Publication series

NameProceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010
Volume49

Other

OtherASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010
Country/TerritoryUnited States
CityAsheville, NC
Period6/23/106/25/10

ASJC Scopus subject areas

  • Engineering (miscellaneous)

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