Size-dependent bubble dynamics in a microchannel heat sink

Luthur Siu Lun Cheung, Man Lee, Yi Kuen Lee, Man Wong, Yitshak Zohar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The height effect on bubble dynamics in a microchannel is experimentally studied. We reported that the critical size for a nucleation site to be active increases linearly with the channel height. However, once a bubble is formed, its evolution from incipience to departure can also be channel-size dependent. Thus, various microchannel heat sinks have been fabricated, about 5-10μm in height, with integrated temperature sensors utilizing Si-to-glass anodic bonding technology. Nucleation sites have been formed on the microchannels bottom silicon surface in order to ensure regular bubble formation, while the sensors allow continuous monitoring of the wall temperature. The microchannels are capped by a glass wafer; hence, it is possible to record the bubble activity using video equipment. The three aspects of bubble dynamics: growth rate, departure size and release frequency have been characterized experimentally, and proper control parameters have been identified.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages670-673
Number of pages4
StatePublished - 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: Jan 30 2005Feb 3 2005

Other

Other18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
CountryUnited States
CityMiami Beach, FL
Period1/30/052/3/05

Fingerprint

Heat sinks
Microchannels
Nucleation
Television equipment
Bubble formation
Glass
Temperature sensors
Silicon
Monitoring
Sensors
Temperature

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Cheung, L. S. L., Lee, M., Lee, Y. K., Wong, M., & Zohar, Y. (2005). Size-dependent bubble dynamics in a microchannel heat sink. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 670-673). [WP3]

Size-dependent bubble dynamics in a microchannel heat sink. / Cheung, Luthur Siu Lun; Lee, Man; Lee, Yi Kuen; Wong, Man; Zohar, Yitshak.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 670-673 WP3.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cheung, LSL, Lee, M, Lee, YK, Wong, M & Zohar, Y 2005, Size-dependent bubble dynamics in a microchannel heat sink. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., WP3, pp. 670-673, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami, Miami Beach, FL, United States, 1/30/05.
Cheung LSL, Lee M, Lee YK, Wong M, Zohar Y. Size-dependent bubble dynamics in a microchannel heat sink. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 670-673. WP3
Cheung, Luthur Siu Lun ; Lee, Man ; Lee, Yi Kuen ; Wong, Man ; Zohar, Yitshak. / Size-dependent bubble dynamics in a microchannel heat sink. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. pp. 670-673
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