Slope-sensitive optical probe for freeform optics metrology

Michael A. Echter, Andrew D. Keene, Christopher D. Roll, Jonathan D. Ellis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Freeform and conformal optics represent the next generation of optical systems where their utilization leads to more compact, lighter, and higher performance systems for solar collectors, consumer optics, and defense applications. Optical coordinate measuring machines present one option for accurate metrology of freeform components but have two limitations: metrology system errors and optical probe errors. In this work, we address the latter of the two by demonstrating a compact optical probe capable of fiber delivery and fiber detection to remove potential heats sources away from measured optic. A bench top demonstrator has yielded a displacement resolution below ±10 nm and has a noise floor of approximately ±18 μrad for surface slope in two orthogonal directions. In this Proceedings, we discuss our probe concept, operating principle, and preliminary measurements with a bench top proof-of-concept system. The goal of this work is to ultimately integrate this probe into OptiPro's UltraSurf, a 5-axis optical coordinate measuring machine for measuring freeform and conformal optics.

Original languageEnglish (US)
Title of host publicationOptifab 2013
DOIs
StatePublished - Nov 28 2013
Externally publishedYes
EventOptifab 2013 - Rochester, NY, United States
Duration: Oct 14 2013Oct 17 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8884
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherOptifab 2013
CountryUnited States
CityRochester, NY
Period10/14/1310/17/13

Keywords

  • Conformal
  • Displacement interferometer
  • Fiber bundle
  • Freeform
  • Optics
  • Probe

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Echter, M. A., Keene, A. D., Roll, C. D., & Ellis, J. D. (2013). Slope-sensitive optical probe for freeform optics metrology. In Optifab 2013 [88842C] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8884). https://doi.org/10.1117/12.2029249