Snapshot multi-wavelength interference microscope

Xiaobo Tian, Xingzhou Tu, Junchao Zhang, Oliver Spires, Neal Brock, Stanley K H Pau, Rongguang Liang

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Abstract

A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.

Original languageEnglish (US)
JournalOptics Express
Volume26
Issue number14
DOIs
Publication statusPublished - Jul 9 2018

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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