Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped and gallium-doped zinc oxide thin films as transparent conductive electrodes

Zhaozhao Zhu, Trent Mankowski, Kaushik Balakrishnan, Ali Sehpar Shikoh, Farid Touati, Mohieddine A. Benammar, Masud Mansuripur, Charles M Falco

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Zinc oxide and aluninum/gallium-doped zinc oxide thin films were deposited via sol-gel spin-coating technique. Employing plasma treatment as alternative to post thermal annealing, we found that the morphologies of these thin films have changed and the sheet resistances have been significantly enhanced. These plasma-treated thin films also show very good optical properties, with transmittance above 90% averaged over the visible wavelength range. Our best aluminum/gallium-doped zinc oxide thin films exhibit sheet resistances (Rs) of ∼ 200 Ω/sq and ∼ 150 Ω/sq, respectively.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume9561
ISBN (Print)9781628417272
DOIs
StatePublished - 2015
EventThin Films for Solar and Energy Technology VII - San Diego, United States
Duration: Aug 9 2015Aug 10 2015

Other

OtherThin Films for Solar and Energy Technology VII
CountryUnited States
CitySan Diego
Period8/9/158/10/15

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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    Zhu, Z., Mankowski, T., Balakrishnan, K., Shikoh, A. S., Touati, F., Benammar, M. A., Mansuripur, M., & Falco, C. M. (2015). Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped and gallium-doped zinc oxide thin films as transparent conductive electrodes. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 9561). [956109] SPIE. https://doi.org/10.1117/12.2186144