Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped and gallium-doped zinc oxide thin films as transparent conductive electrodes

Zhaozhao Zhu, Trent Mankowski, Kaushik Balakrishnan, Ali Sehpar Shikoh, Farid Touati, Mohieddine A. Benammar, Masud Mansuripur, Charles M. Falco

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Zinc oxide and aluninum/gallium-doped zinc oxide thin films were deposited via sol-gel spin-coating technique. Employing plasma treatment as alternative to post thermal annealing, we found that the morphologies of these thin films have changed and the sheet resistances have been significantly enhanced. These plasma-treated thin films also show very good optical properties, with transmittance above 90% averaged over the visible wavelength range. Our best aluminum/gallium-doped zinc oxide thin films exhibit sheet resistances (Rs) of ∼ 200 Ω/sq and ∼ 150 Ω/sq, respectively.

Original languageEnglish (US)
Title of host publicationThin Films for Solar and Energy Technology VII
EditorsLouay A. Eldada, Michael J. Heben
PublisherSPIE
ISBN (Electronic)9781628417272
DOIs
StatePublished - 2015
EventThin Films for Solar and Energy Technology VII - San Diego, United States
Duration: Aug 9 2015Aug 10 2015

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9561
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherThin Films for Solar and Energy Technology VII
CountryUnited States
CitySan Diego
Period8/9/158/10/15

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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