Sol-gel derived Pb1-xCaxTiO3 thin films

G. Teowee, K. C. McCarthy, T. P. Alexander, T. J. Bukowski, D. R. Uhlmann

Research output: Contribution to conferencePaper

5 Scopus citations

Abstract

A series of sol-gel derived CaTiO3 - PbTiO3 thin films were prepared on platinized Si substrates and fired to temperatures ranging from 550C to 650C. Multiple spincoating, with an intermediate firing of 400C between coatings, was performed to obtain films up to 0.5 μm thick. All the films were single phase perovskite after firing to 600C. The dielectric constant ranged from 100-300 depending on the amount of Ca. Leakage currents as low as 2*10-9 A/cm2 were obtained in these films.

Original languageEnglish (US)
Pages487-490
Number of pages4
StatePublished - Dec 1 1996
Externally publishedYes
EventProceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2) - East Brunswick, NJ, USA
Duration: Aug 18 1996Aug 21 1996

Other

OtherProceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2)
CityEast Brunswick, NJ, USA
Period8/18/968/21/96

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Teowee, G., McCarthy, K. C., Alexander, T. P., Bukowski, T. J., & Uhlmann, D. R. (1996). Sol-gel derived Pb1-xCaxTiO3 thin films. 487-490. Paper presented at Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2), East Brunswick, NJ, USA, .