Spatial distribution of vacuum ultraviolet radiation in an inductively coupled plasma

Jeffery Babis, Michael J. Pilon, M Bonner Denton

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Spatially resolved emission maps of an ICP as a function of torch design, power, and gas flow rate have been obtained for O, N, Cl, Br, and C in the vacuum ultraviolet with the use of an Abel inversion data reduction algorithm. Two coolant tube configurations were studied, one a standard strait coolant tube with a 'bell'-style collar, and a second with a 'T'-shaped sidearm tube. The studies show that the maximum emission intensities for Br and Cl occurred below the top of the coolant tube and that the N 149.28-nm emission cannot be observed for the bell collar configuration. The investigation of the T-tube configuration yielded useful information for all elements studied, with optimum observation heights ranging from 8 mm above the load coil for C at 165.70 nm to 20 mm above the load coil for O at 130.49 nm. In most cases, the maximum intensity is observed in the center of the discharge. Signal-to-noise studies indicate that the highest power practical with the minimum flow rate possible should be used for the analysis of the four nonmetals investigated.

Original languageEnglish (US)
Pages (from-to)1281-1289
Number of pages9
JournalApplied Spectroscopy
Volume44
Issue number8
StatePublished - Jan 1 1990

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far ultraviolet radiation
Inductively coupled plasma
Vacuum
Ultraviolet radiation
Coolants
Spatial distribution
Noise
spatial distribution
Gases
Observation
Radiation
tubes
coolants
Flow rate
Nonmetals
Plasma torches
bells
coils
flow velocity
configurations

ASJC Scopus subject areas

  • Engineering(all)
  • Spectroscopy
  • Medicine(all)

Cite this

Spatial distribution of vacuum ultraviolet radiation in an inductively coupled plasma. / Babis, Jeffery; Pilon, Michael J.; Denton, M Bonner.

In: Applied Spectroscopy, Vol. 44, No. 8, 01.01.1990, p. 1281-1289.

Research output: Contribution to journalArticle

Babis, Jeffery ; Pilon, Michael J. ; Denton, M Bonner. / Spatial distribution of vacuum ultraviolet radiation in an inductively coupled plasma. In: Applied Spectroscopy. 1990 ; Vol. 44, No. 8. pp. 1281-1289.
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