Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures

Akram A. Khosroabadi, Robert A Norwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Spectroscopic ellipsometry has been used to find the optical constants, including refractive index, extinction coefficient, thickness and volume fraction of nanostructured transparent conducting oxides including indium tin oxide (ITO) and indium zinc oxide (IZO). We observed sharp features in the ellipsometry data, with the spectral peaks and positions depending on the nanostructure dimensions and material. A superposition of Lorentzian oscillators and the effective medium approximation has been applied to determine the volume ratio of voids and nanopillars, thereby providing the effective optical constants.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8632
DOIs
StatePublished - 2013
EventPhotonic and Phononic Properties of Engineered Nanostructures III - San Francisco, CA, United States
Duration: Feb 3 2013Feb 7 2013

Other

OtherPhotonic and Phononic Properties of Engineered Nanostructures III
CountryUnited States
CitySan Francisco, CA
Period2/3/132/7/13

Fingerprint

Spectroscopic Ellipsometry
Optical Constants
Optical constants
Spectroscopic ellipsometry
indium oxides
Indium
Oxides
ellipsometry
Zinc Oxide
Ellipsometry
Light extinction
conduction
oxides
Voids
Zinc oxide
Tin oxides
Nanostructures
Volume Fraction
Extinction
zinc oxides

Keywords

  • Nanostructure
  • Spectroscopy ellipsometry
  • Transparent Conducting oxide (TCO)

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Khosroabadi, A. A., & Norwood, R. A. (2013). Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8632). [86320I] https://doi.org/10.1117/12.2002827

Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures. / Khosroabadi, Akram A.; Norwood, Robert A.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8632 2013. 86320I.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Khosroabadi, AA & Norwood, RA 2013, Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 8632, 86320I, Photonic and Phononic Properties of Engineered Nanostructures III, San Francisco, CA, United States, 2/3/13. https://doi.org/10.1117/12.2002827
Khosroabadi AA, Norwood RA. Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8632. 2013. 86320I https://doi.org/10.1117/12.2002827
Khosroabadi, Akram A. ; Norwood, Robert A. / Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8632 2013.
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