Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures

Akram A. Khosroabadi, R. A. Norwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Spectroscopic ellipsometry has been used to find the optical constants, including refractive index, extinction coefficient, thickness and volume fraction of nanostructured transparent conducting oxides including indium tin oxide (ITO) and indium zinc oxide (IZO). We observed sharp features in the ellipsometry data, with the spectral peaks and positions depending on the nanostructure dimensions and material. A superposition of Lorentzian oscillators and the effective medium approximation has been applied to determine the volume ratio of voids and nanopillars, thereby providing the effective optical constants.

Original languageEnglish (US)
Title of host publicationPhotonic and Phononic Properties of Engineered Nanostructures III
DOIs
StatePublished - Jun 3 2013
EventPhotonic and Phononic Properties of Engineered Nanostructures III - San Francisco, CA, United States
Duration: Feb 3 2013Feb 7 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8632
ISSN (Print)0277-786X

Other

OtherPhotonic and Phononic Properties of Engineered Nanostructures III
CountryUnited States
CitySan Francisco, CA
Period2/3/132/7/13

Keywords

  • Nanostructure
  • Spectroscopy ellipsometry
  • Transparent Conducting oxide (TCO)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Khosroabadi, A. A., & Norwood, R. A. (2013). Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures. In Photonic and Phononic Properties of Engineered Nanostructures III [86320I] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8632). https://doi.org/10.1117/12.2002827