SPGD and Newton iteration mixed algorithm used in freeform surface metrology

Yu Zhang, Xiaobo Tian, Rongguang Liang

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

Freeform surfaces are widely used in advanced optical systems. In order to accurately measure freeform surfaces, an adaptive interferometer with deformable mirror (DM) has been developed for the freeform surface metrology. To ensure the efficiency, a stochastic parallel gradient descent (SPGD) and Newton iteration mixed algorithm to drive the DM has been proposed, it can achieve the minimum value of the optimization and is suitable for the different interferograms. The simulation and experimental results verify the correctness and feasibility of the proposed DM driving algorithm.

Original languageEnglish (US)
Article number106050
JournalOptics and Lasers in Engineering
Volume129
DOIs
StatePublished - Jun 2020

Keywords

  • Deformable mirror
  • Freeform surface
  • Newton iteration algorithm
  • Optimization
  • Stochastic parallel gradient descent algorithm

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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