SPUTTER DEPOSITED MULTILAYER V-UV MIRRORS.

Felix E. Fernandez, Charles M Falco

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

The design and fabrication of aluminum/niobium multilayers to be used as normal-incidence reflectors for 300 A radiation are presented. Preliminary characterization results are discussed showing the effects of interfacial roughness and diffusion.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsGerald F. Marshall
PublisherSPIE
Pages195-200
Number of pages6
Volume563
ISBN (Print)0892525983
StatePublished - 1985

Fingerprint

Niobium
niobium
reflectors
Multilayers
roughness
incidence
Surface roughness
mirrors
aluminum
Aluminum
Radiation
Fabrication
fabrication
radiation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Fernandez, F. E., & Falco, C. M. (1985). SPUTTER DEPOSITED MULTILAYER V-UV MIRRORS. In G. F. Marshall (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 563, pp. 195-200). SPIE.

SPUTTER DEPOSITED MULTILAYER V-UV MIRRORS. / Fernandez, Felix E.; Falco, Charles M.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Gerald F. Marshall. Vol. 563 SPIE, 1985. p. 195-200.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fernandez, FE & Falco, CM 1985, SPUTTER DEPOSITED MULTILAYER V-UV MIRRORS. in GF Marshall (ed.), Proceedings of SPIE - The International Society for Optical Engineering. vol. 563, SPIE, pp. 195-200.
Fernandez FE, Falco CM. SPUTTER DEPOSITED MULTILAYER V-UV MIRRORS. In Marshall GF, editor, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 563. SPIE. 1985. p. 195-200
Fernandez, Felix E. ; Falco, Charles M. / SPUTTER DEPOSITED MULTILAYER V-UV MIRRORS. Proceedings of SPIE - The International Society for Optical Engineering. editor / Gerald F. Marshall. Vol. 563 SPIE, 1985. pp. 195-200
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