Sputter deposited multilayer V-UV mirrors

Felix E. Fernandez, Charles M. Falco

Research output: Contribution to journalArticlepeer-review

8 Scopus citations


The design and fabrication of aluminum/niobium multilayers to be used as normal-incidence reflectors for 300 Å radiation are presented. Preliminary characterization results are discussed showing the effects of interfacial roughness and diffusion.

Original languageEnglish (US)
Pages (from-to)195-200
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - Aug 6 1985
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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