Steerable diffraction limited line illumination system using deformable mirror

Koichi Taniguchi, Dae Wook Kim, Kei Shimura, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Many scientific and industrial applications often require high performance optical systems utilizing spatially shaped illumination patterns of laser beams. Precisely shaped line illumination can be used for various line scanning systems or surface inspection devices. In order to achieve the highest resolution or superior signal to noise ratio limited by the fundamental theory, a diffraction limited illumination optical system (e.g. <0.8 Strehl ratio) gives the narrowest illumination line width determined by the system's NA (Numerical Aperture) value. For high precision and in-factory industrial applications, the Diffraction Limited Line Illumination (DLLI) needs to be controlled in three dimensional space rapidly as the target object under the illumination may not be always aligned with respect to the illumination system. A steerable DLLI system with three degrees of freedom (i.e. axial displacement, rotation, and tilt) is developed using an adaptive optics system. By electronically controlling the Zernike based surface shapes of the deformable mirror, the DLLI in free space is actively positioned and oriented with high accuracy. The geometrical optics based mathematical model to control the Zernike modes of the deformable mirror and the performance of a bench-top proof-ofconcept system will be presented with experimental data and analysis results.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8843
DOIs
StatePublished - 2013
EventLaser Beam Shaping XIV - San Diego, CA, United States
Duration: Aug 26 2013Aug 26 2013

Other

OtherLaser Beam Shaping XIV
CountryUnited States
CitySan Diego, CA
Period8/26/138/26/13

Fingerprint

Deformable Mirror
deformable mirrors
Diffraction
Illumination
Mirrors
Lighting
illumination
Line
diffraction
Industrial Application
Optical systems
Optical System
Industrial applications
Geometrical optics
Geometrical Optics
Adaptive optics
Proof System
Degrees of freedom (mechanics)
geometrical optics
Adaptive Optics

Keywords

  • Adaptive optics
  • Beam shaping and line illumination
  • Deformable mirror

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Taniguchi, K., Kim, D. W., Shimura, K., & Burge, J. H. (2013). Steerable diffraction limited line illumination system using deformable mirror. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8843). [88430A] https://doi.org/10.1117/12.2023431

Steerable diffraction limited line illumination system using deformable mirror. / Taniguchi, Koichi; Kim, Dae Wook; Shimura, Kei; Burge, James H.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8843 2013. 88430A.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Taniguchi, K, Kim, DW, Shimura, K & Burge, JH 2013, Steerable diffraction limited line illumination system using deformable mirror. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 8843, 88430A, Laser Beam Shaping XIV, San Diego, CA, United States, 8/26/13. https://doi.org/10.1117/12.2023431
Taniguchi K, Kim DW, Shimura K, Burge JH. Steerable diffraction limited line illumination system using deformable mirror. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8843. 2013. 88430A https://doi.org/10.1117/12.2023431
Taniguchi, Koichi ; Kim, Dae Wook ; Shimura, Kei ; Burge, James H. / Steerable diffraction limited line illumination system using deformable mirror. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8843 2013.
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