Stoichiometry and thickness of the initial oxide formed on clean titanium surfaces determined by quantitative Auger electron spectroscopy, electron energy loss spectroscopy, and microgravimetry

M. C. Burrell, N. R. Armstrong

Research output: Contribution to journalArticlepeer-review

36 Scopus citations

Abstract

The initial oxidation of a clean polycrystalline titanium film was studied by Auger electron spectroscopy (AES) and electron energy loss spectroscopy (ELS), while simultaneously monitoring the total oxygen uptake using the quartz crystal microbalance (QCM). Quantitation of the OKLL and TiLMM AES intensities reveals that the surface stoichiometry at the initial stages of oxidation (<100LO2at 1X 10“5Torr) corresponds to that expected for Ti203, and the ELS results also suggest the presence of the lower oxidation states of titanium ( + 2, + 3) on the surface. The microgravimetric results indicate that the oxidation is not confined to the region sampled by the electron spectroscopic methods, and a surface layer of Ti203 whose thickness is — 40 A is consistent with the observed combination of results.

Original languageEnglish (US)
Pages (from-to)1831-1836
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume1
Issue number4
DOIs
StatePublished - Oct 1983

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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