The initial oxidation of a clean polycrystalline titanium film was studied by Auger electron spectroscopy (AES) and electron energy loss spectroscopy (ELS), while simultaneously monitoring the total oxygen uptake using the quartz crystal microbalance (QCM). Quantitation of the O KLL and Ti LMM AES intensities reveals that the surface stoichiometry at the initial stages of oxidation ( less than 100 L O//2 at 1 multiplied by 10** minus **5 Torr) corresponds to that expected for Ti//2O//3, and the ELS results also suggest the presence of the lower oxidation states of titanium ( plus 2, plus 3) on the surface. The microgravimetric results indicate that the oxidation is not confined to the region sampled by the electron spectroscopic methods, and a surface layer of Ti//2O//3 whose thickness is approximately 40 A is consistent with the observed combination of results.
|Original language||English (US)|
|Number of pages||6|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - Oct 1983|
ASJC Scopus subject areas
- Surfaces, Coatings and Films