Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet

J. M. Slaughter, Dean W. Schulze, C. R. Hills, A. Mirone, R. Stalio, R. N. Watts, C. Tarrio, T. B. Lucatorto, M. Krumrey, P. Mueller, Charles M Falco

Research output: Contribution to journalArticle

70 Citations (Scopus)

Abstract

This study aims to compare multilayer made by sputtering and evaporation and to show how each of the structural and compositional parameters that describe a multilayer, affects the EUV reflectivity. To accomplish these goals, the rigorous characterization routine described here is necessary. Through the use of various deposition parameters, multilayers are made, and they are characterized with three types of x-ray diffraction, TEM, Rutherford backscattering spectrometry, and Auger depth profiling. Their performance was evaluated by measuring the EUV reflectivity as a function of wavelength using a synchrotron-radiation source.

Original languageEnglish (US)
Pages (from-to)2144-2156
Number of pages13
JournalJournal of Applied Physics
Volume76
Issue number4
DOIs
StatePublished - Jan 1 1994

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mirrors
reflectance
radiation sources
backscattering
synchrotron radiation
x ray diffraction
sputtering
evaporation
transmission electron microscopy
wavelengths
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Slaughter, J. M., Schulze, D. W., Hills, C. R., Mirone, A., Stalio, R., Watts, R. N., ... Falco, C. M. (1994). Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet. Journal of Applied Physics, 76(4), 2144-2156. https://doi.org/10.1063/1.357626

Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet. / Slaughter, J. M.; Schulze, Dean W.; Hills, C. R.; Mirone, A.; Stalio, R.; Watts, R. N.; Tarrio, C.; Lucatorto, T. B.; Krumrey, M.; Mueller, P.; Falco, Charles M.

In: Journal of Applied Physics, Vol. 76, No. 4, 01.01.1994, p. 2144-2156.

Research output: Contribution to journalArticle

Slaughter, JM, Schulze, DW, Hills, CR, Mirone, A, Stalio, R, Watts, RN, Tarrio, C, Lucatorto, TB, Krumrey, M, Mueller, P & Falco, CM 1994, 'Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet', Journal of Applied Physics, vol. 76, no. 4, pp. 2144-2156. https://doi.org/10.1063/1.357626
Slaughter JM, Schulze DW, Hills CR, Mirone A, Stalio R, Watts RN et al. Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet. Journal of Applied Physics. 1994 Jan 1;76(4):2144-2156. https://doi.org/10.1063/1.357626
Slaughter, J. M. ; Schulze, Dean W. ; Hills, C. R. ; Mirone, A. ; Stalio, R. ; Watts, R. N. ; Tarrio, C. ; Lucatorto, T. B. ; Krumrey, M. ; Mueller, P. ; Falco, Charles M. / Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet. In: Journal of Applied Physics. 1994 ; Vol. 76, No. 4. pp. 2144-2156.
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