Structure and physical properties of sputtered metallic superlattices

Ivan K. Schuller; Charles M. Falco

doi:10.1016/0039-6028(82)90630-6

Structure and physical properties of sputtered metallic superlattices

Ivan K. Schuller, Charles M. Falco

Optical Sciences, College of

Research output: Contribution to journal › Article › peer-review

36 Scopus citations

Abstract

The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.

Original language	English (US)
Pages (from-to)	443-453
Number of pages	11
Journal	Surface Science
Volume	113
Issue number	1-3
DOIs	https://doi.org/10.1016/0039-6028(82)90630-6
State	Published - Jan 1 1982

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/0039-6028(82)90630-6

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title = "Structure and physical properties of sputtered metallic superlattices",

abstract = "The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.",

author = "Schuller, {Ivan K.} and Falco, {Charles M.}",

note = "Funding Information: We would like to thank our collaborators I. Banerjee, R.T. Kampwirth, J.B. Ketterson, M. Khan, K. Meyer, T.R. Werner, Q.S. Yang and J-Q. Zheng on various aspectso f this work. We would also like to thank Dr. Gene R. Sparrow for obtaining the ISS spectra on our samples and to The Physical Electronics Laboratories who performed some the Auger measurements. This work is supported by the Office of Naval Research Contract NOOO14-80-F-0074a nd by the US Department of Energy.",

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doi = "10.1016/0039-6028(82)90630-6",

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T1 - Structure and physical properties of sputtered metallic superlattices

AU - Schuller, Ivan K.

AU - Falco, Charles M.

N1 - Funding Information: We would like to thank our collaborators I. Banerjee, R.T. Kampwirth, J.B. Ketterson, M. Khan, K. Meyer, T.R. Werner, Q.S. Yang and J-Q. Zheng on various aspectso f this work. We would also like to thank Dr. Gene R. Sparrow for obtaining the ISS spectra on our samples and to The Physical Electronics Laboratories who performed some the Auger measurements. This work is supported by the Office of Naval Research Contract NOOO14-80-F-0074a nd by the US Department of Energy.

PY - 1982/1/1

Y1 - 1982/1/1

N2 - The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.

AB - The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.

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Structure and physical properties of sputtered metallic superlattices

Abstract

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