Abstract
The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 443-453 |
| Number of pages | 11 |
| Journal | Surface Science |
| Volume | 113 |
| Issue number | 1-3 |
| DOIs | |
| State | Published - Jan 1 1982 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Condensed Matter Physics
- Surfaces and Interfaces
Cite this
Structure and physical properties of sputtered metallic superlattices. / Schuller, Ivan K.; Falco, Charles M.
In: Surface Science, Vol. 113, No. 1-3, 01.01.1982, p. 443-453.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Structure and physical properties of sputtered metallic superlattices
AU - Schuller, Ivan K.
AU - Falco, Charles M
PY - 1982/1/1
Y1 - 1982/1/1
N2 - The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.
AB - The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.
UR - http://www.scopus.com/inward/record.url?scp=0006011119&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0006011119&partnerID=8YFLogxK
U2 - 10.1016/0039-6028(82)90630-6
DO - 10.1016/0039-6028(82)90630-6
M3 - Article
AN - SCOPUS:0006011119
VL - 113
SP - 443
EP - 453
JO - Surface Science
JF - Surface Science
SN - 0039-6028
IS - 1-3
ER -