Structure and physical properties of sputtered metallic superlattices

Ivan K. Schuller, Charles M Falco

Research output: Contribution to journalArticle

36 Citations (Scopus)

Abstract

The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.

Original languageEnglish (US)
Pages (from-to)443-453
Number of pages11
JournalSurface Science
Volume113
Issue number1-3
DOIs
StatePublished - Jan 1 1982
Externally publishedYes

Fingerprint

Metallic superlattices
superlattices
Physical properties
physical properties
Ions
ion scattering
Auger spectroscopy
electron spectroscopy
energy distribution
ions
superconductivity
sputtering
Auger electron spectroscopy
Superconductivity
electrical resistivity
Sputtering
diffraction
Spectroscopy
Scattering
spectroscopy

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Structure and physical properties of sputtered metallic superlattices. / Schuller, Ivan K.; Falco, Charles M.

In: Surface Science, Vol. 113, No. 1-3, 01.01.1982, p. 443-453.

Research output: Contribution to journalArticle

@article{9243aa6ba6644e5c985f2639d1aacf0c,
title = "Structure and physical properties of sputtered metallic superlattices",
abstract = "The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.",
author = "Schuller, {Ivan K.} and Falco, {Charles M}",
year = "1982",
month = "1",
day = "1",
doi = "10.1016/0039-6028(82)90630-6",
language = "English (US)",
volume = "113",
pages = "443--453",
journal = "Surface Science",
issn = "0039-6028",
publisher = "Elsevier",
number = "1-3",

}

TY - JOUR

T1 - Structure and physical properties of sputtered metallic superlattices

AU - Schuller, Ivan K.

AU - Falco, Charles M

PY - 1982/1/1

Y1 - 1982/1/1

N2 - The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.

AB - The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.

UR - http://www.scopus.com/inward/record.url?scp=0006011119&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0006011119&partnerID=8YFLogxK

U2 - 10.1016/0039-6028(82)90630-6

DO - 10.1016/0039-6028(82)90630-6

M3 - Article

AN - SCOPUS:0006011119

VL - 113

SP - 443

EP - 453

JO - Surface Science

JF - Surface Science

SN - 0039-6028

IS - 1-3

ER -