Structure and physical properties of sputtered metallic superlattices

Ivan K. Schuller, Charles M. Falco

Research output: Contribution to journalArticlepeer-review

36 Scopus citations


The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.

Original languageEnglish (US)
Pages (from-to)443-453
Number of pages11
JournalSurface Science
Issue number1-3
StatePublished - Jan 1 1982

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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