Structure and physical properties of sputtered metallic superlattices

Ivan K. Schuller; Charles M. Falco

doi:10.1016/0039-6028(82)90630-6

Structure and physical properties of sputtered metallic superlattices

Ivan K. Schuller, Charles M. Falco

Optical Sciences, College of

Research output: Contribution to journal › Article

36 Scopus citations

Abstract

The technique of preparing metallic superlattices by sputtering is described as are the results of a calculation of the energy distribution of sputtered atoms. Structural studies by X-ray diffraction, Ion Mill Auger Electron Spectroscopy and Ion Mill Ion Scattering Spectroscopy all indicate well defined layer structure for the Nb/Cu system. The resistivity of Nb/Cu and Nb/Ti and the superconductivity of Nb/Cu are all found to be dependent upon the layered nature of the material.

Original language	English (US)
Pages (from-to)	443-453
Number of pages	11
Journal	Surface Science
Volume	113
Issue number	1-3
DOIs	https://doi.org/10.1016/0039-6028(82)90630-6
State	Published - Jan 1 1982

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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Schuller, I. K., & Falco, C. M. (1982). Structure and physical properties of sputtered metallic superlattices. Surface Science, 113(1-3), 443-453. https://doi.org/10.1016/0039-6028(82)90630-6

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