Study of bubble activity in a megasonic field using an electrochemical technique

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2 Scopus citations

Abstract

In the megasonic cleaning of wafers, size and motion of cavitating bubbles and fluid flow due to acoustic streaming play a very important role. In this paper, chronoamperometric technique has been used to seek information on acoustic streaming and bubble activity in a 1 MHz sound field. Specifically, current transients during reduction of potassium ferricyanide were recorded. Data collected at 1-6 MHz sampling rate using a 25 μm platinum electrode show current peaks indicative of the approach of oscillating bubbles to the electrode and current valleys due to blocking of the electrode by bubbles. Acoustic streaming velocity (∼ 1.5 cm/s) and bubble size (maximum radius of ∼ 1μ m for oscillating bubbles) have been estimated from local current transients caused by bubble activity near the electrode.

Original languageEnglish (US)
Article number5997318
Pages (from-to)513-518
Number of pages6
JournalIEEE Transactions on Semiconductor Manufacturing
Volume24
Issue number4
DOIs
StatePublished - Nov 1 2011

Keywords

  • Acoustic streaming
  • bubble size
  • chronoamperometry
  • megasonic
  • wafer cleaning

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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