Study of Low-k Film Functionalization and Pore Sealing Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide

Eduardo Vyhmeister, Lorenzo Reyes-Bozo, Roman Rodríguez-Maecker, Anthony Muscat, David Suleiman, L. Antonio Estévez

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

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Engineering & Materials Science

Chemical Compounds