Study of the instrument transfer function of a free-form optics metrology system: SCOTS

Tianquan Su, Alejandro Maldonado, Peng Su, Ping Zhou, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Instrument transfer function (ITF) of an imaging based metrology system is usually closely related to its imaging transfer function. The Software Configurable Optical Test System (SCOTS), a highly accurate aspheric and freeform surface metrology, is an imaging deflectometry system consisting of a camera and a display screen. We demonstrate that its ITF follows the camera imaging MTF through numerical simulations, considering a diffraction limited camera. We then applied this result to the edge measurement data of a large mirror. A better agreement is achieved between SCOTS test and a test-plate interferometric test after the compensation. This suggests that more attention should be paid to the image quality of the SCOTS for high accuracy measurement.

Original languageEnglish (US)
Title of host publication2013 International Conference on Optical Instruments and Technology
Subtitle of host publicationOptoelectronic Measurement Technology and Systems
PublisherSPIE
ISBN (Print)9780819499646
DOIs
StatePublished - Jan 1 2013
Event2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems - Beijing, China
Duration: Nov 17 2013Nov 19 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9046
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

Other2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
CountryChina
CityBeijing
Period11/17/1311/19/13

Keywords

  • Fringe reflection
  • Optical metrology
  • deflectometry
  • free-form surfaces
  • instrument transfer function

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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