Study of the micro-structure of PtxSi ultra-thin film

Liu Shuang, Charles M. Falco, Zhiyong Zhong

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

Ultra-thin platinum (Pt) films were deposited on Si(100) substrates at 160°C by magnetron sputtering and subsequently annealed to form silicides. The thickness of the PtxSi films was found to be approximately 4 nm as determined by transmission electron microscopy (TEM). X-ray photoelectron spectroscopy (XPS) analysis shows that these films consist of PtSi and Pt 2Si phases, and a multi-layer configuration of SiO x/PtSi/Pt2 Si/Si was detected by angle-resolved XPS. However, the Pt3Si phase was not detected by X-ray diffraction (XRD).

Original languageEnglish (US)
Pages (from-to)2925-2929
Number of pages5
JournalInternational Journal of Modern Physics B
Volume25
Issue number21
DOIs
StatePublished - Aug 20 2011

Keywords

  • Platinum
  • X-ray photoelectron spectroscopy (XPS)
  • binding energy
  • multilayers, transmission electron microscopy (TEM)
  • sputtering

ASJC Scopus subject areas

  • Statistical and Nonlinear Physics
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Study of the micro-structure of Pt<sub>x</sub>Si ultra-thin film'. Together they form a unique fingerprint.

Cite this