Sub-Nyquist Interferometry: Results and Implementation Issues

Russell J. Palum, John E Greivenkamp

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Phase-shifting interferometry (PSI) is the generally accepted technique for data acquisition and computer analysis of interferometric patterns. General purpose instruments that use this technique for the measurement of spheres and flats are available from a number of vendors. Recent improvements in the fabrication of aspheric surfaces have led to interest in a similar instrument for the measurement of aspheric surfaces. This instrument must be able to measure large departures from a reference surface, which is a limitation of PSI. Sub-Nyquist interferometry (SNI) extends the range of PSI by using a priori knowledge of the test surface. This paper will review SNI, discuss its hardware implementation, and give the results of preliminary wavefront analysis.

Original languageEnglish (US)
Pages (from-to)378-388
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1162
DOIs
StatePublished - Apr 25 1990
Externally publishedYes

Fingerprint

Interferometry
interferometry
Phase Shifting
Aspheric Surface
Hardware Implementation
Wavefronts
Data Acquisition
Wave Front
data acquisition
Data acquisition
Fabrication
hardware
Hardware
fabrication
Range of data

ASJC Scopus subject areas

  • Applied Mathematics
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Computer Science Applications

Cite this

Sub-Nyquist Interferometry : Results and Implementation Issues. / Palum, Russell J.; Greivenkamp, John E.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1162, 25.04.1990, p. 378-388.

Research output: Contribution to journalArticle

@article{b49c9c88b8684153bf20b23649d8e0c9,
title = "Sub-Nyquist Interferometry: Results and Implementation Issues",
abstract = "Phase-shifting interferometry (PSI) is the generally accepted technique for data acquisition and computer analysis of interferometric patterns. General purpose instruments that use this technique for the measurement of spheres and flats are available from a number of vendors. Recent improvements in the fabrication of aspheric surfaces have led to interest in a similar instrument for the measurement of aspheric surfaces. This instrument must be able to measure large departures from a reference surface, which is a limitation of PSI. Sub-Nyquist interferometry (SNI) extends the range of PSI by using a priori knowledge of the test surface. This paper will review SNI, discuss its hardware implementation, and give the results of preliminary wavefront analysis.",
author = "Palum, {Russell J.} and Greivenkamp, {John E}",
year = "1990",
month = "4",
day = "25",
doi = "10.1117/12.962764",
language = "English (US)",
volume = "1162",
pages = "378--388",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",

}

TY - JOUR

T1 - Sub-Nyquist Interferometry

T2 - Results and Implementation Issues

AU - Palum, Russell J.

AU - Greivenkamp, John E

PY - 1990/4/25

Y1 - 1990/4/25

N2 - Phase-shifting interferometry (PSI) is the generally accepted technique for data acquisition and computer analysis of interferometric patterns. General purpose instruments that use this technique for the measurement of spheres and flats are available from a number of vendors. Recent improvements in the fabrication of aspheric surfaces have led to interest in a similar instrument for the measurement of aspheric surfaces. This instrument must be able to measure large departures from a reference surface, which is a limitation of PSI. Sub-Nyquist interferometry (SNI) extends the range of PSI by using a priori knowledge of the test surface. This paper will review SNI, discuss its hardware implementation, and give the results of preliminary wavefront analysis.

AB - Phase-shifting interferometry (PSI) is the generally accepted technique for data acquisition and computer analysis of interferometric patterns. General purpose instruments that use this technique for the measurement of spheres and flats are available from a number of vendors. Recent improvements in the fabrication of aspheric surfaces have led to interest in a similar instrument for the measurement of aspheric surfaces. This instrument must be able to measure large departures from a reference surface, which is a limitation of PSI. Sub-Nyquist interferometry (SNI) extends the range of PSI by using a priori knowledge of the test surface. This paper will review SNI, discuss its hardware implementation, and give the results of preliminary wavefront analysis.

UR - http://www.scopus.com/inward/record.url?scp=84958515180&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84958515180&partnerID=8YFLogxK

U2 - 10.1117/12.962764

DO - 10.1117/12.962764

M3 - Article

AN - SCOPUS:84958515180

VL - 1162

SP - 378

EP - 388

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

ER -