Subsurface damage characterization with nonlinear high numerical microscopy

Phat Lu, Youngsik Kim, Thomas D Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Sub-surface damage characterization occurs in semiconductor device fabrication, like diamond turning and milling. Third harmonic generation (THG) microscopy can help to characterize subsurface damage, because nanometer sized asperities caused by defects amplify the THG signal.

Original languageEnglish (US)
Title of host publicationLaser Science, LS 2014
PublisherOptical Society of America (OSA)
ISBN (Print)1557522863
StatePublished - Oct 14 2014
EventLaser Science, LS 2014 - Tucson, United States
Duration: Oct 19 2014Oct 23 2014

Other

OtherLaser Science, LS 2014
CountryUnited States
CityTucson
Period10/19/1410/23/14

Fingerprint

Harmonic generation
Microscopic examination
Diamond
Milling (machining)
Semiconductor devices
Diamonds
Fabrication
Defects

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Lu, P., Kim, Y., & Milster, T. D. (2014). Subsurface damage characterization with nonlinear high numerical microscopy. In Laser Science, LS 2014 Optical Society of America (OSA).

Subsurface damage characterization with nonlinear high numerical microscopy. / Lu, Phat; Kim, Youngsik; Milster, Thomas D.

Laser Science, LS 2014. Optical Society of America (OSA), 2014.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lu, P, Kim, Y & Milster, TD 2014, Subsurface damage characterization with nonlinear high numerical microscopy. in Laser Science, LS 2014. Optical Society of America (OSA), Laser Science, LS 2014, Tucson, United States, 10/19/14.
Lu P, Kim Y, Milster TD. Subsurface damage characterization with nonlinear high numerical microscopy. In Laser Science, LS 2014. Optical Society of America (OSA). 2014
Lu, Phat ; Kim, Youngsik ; Milster, Thomas D. / Subsurface damage characterization with nonlinear high numerical microscopy. Laser Science, LS 2014. Optical Society of America (OSA), 2014.
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