Super-Resolution by Combination of a Solid Immersion Lens and an Aperture

Tom D. Milster, Farhad Akhavan, Melissa Bailey, J. Kevin Erwin, David M. Felix, Kusato Hirota, Steven Koester, Kei Shimura, Yan Zhang

Research output: Contribution to journalArticle

23 Scopus citations

Abstract

A solid immersion lens is combined with various aperture shapes in order to improve resolution. Both metallic and dielectric apertures are investigated, and optimum shapes for each are determined. Fabrication techniques for each type of combination probe are discussed and implemented, and a simple experiment with a dielectric combination probe scanning a reflective grating demonstrates improved resolution compared to a solid immersion lens alone.

Original languageEnglish (US)
Pages (from-to)1778-1782
Number of pages5
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume40
Issue number3 B
DOIs
StatePublished - Jan 1 2001

Keywords

  • Near-field optics
  • Optical data storage
  • Solid immersion lens
  • Super resolution

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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    Milster, T. D., Akhavan, F., Bailey, M., Kevin Erwin, J., Felix, D. M., Hirota, K., Koester, S., Shimura, K., & Zhang, Y. (2001). Super-Resolution by Combination of a Solid Immersion Lens and an Aperture. Japanese Journal of Applied Physics, Part 2: Letters, 40(3 B), 1778-1782. https://doi.org/10.1143/jjap.40.1778