Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x

J. L. Makous, L. Maritato, Charles M Falco, J. P. Cronin, G. P. Rajendran, E. V. Uhlmann, Donald R Uhlmann

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

We have fabricated thin films of YBa2Cu3Ox by dc triode sputtering from two metallic targets. Post-annealing in pure O2 after sputtering resulted in superconducting films with a T c onset as high as 89 K and a midpoint Tc of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO2 on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.

Original languageEnglish (US)
Pages (from-to)2164-2166
Number of pages3
JournalApplied Physics Letters
Volume51
Issue number25
DOIs
StatePublished - 1987

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sapphire
sputtering
triodes
superconducting films
thin films
backscattering
x ray diffraction
buffers
gels
coatings
annealing
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x. / Makous, J. L.; Maritato, L.; Falco, Charles M; Cronin, J. P.; Rajendran, G. P.; Uhlmann, E. V.; Uhlmann, Donald R.

In: Applied Physics Letters, Vol. 51, No. 25, 1987, p. 2164-2166.

Research output: Contribution to journalArticle

Makous, JL, Maritato, L, Falco, CM, Cronin, JP, Rajendran, GP, Uhlmann, EV & Uhlmann, DR 1987, 'Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x', Applied Physics Letters, vol. 51, no. 25, pp. 2164-2166. https://doi.org/10.1063/1.98929
Makous, J. L. ; Maritato, L. ; Falco, Charles M ; Cronin, J. P. ; Rajendran, G. P. ; Uhlmann, E. V. ; Uhlmann, Donald R. / Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x. In: Applied Physics Letters. 1987 ; Vol. 51, No. 25. pp. 2164-2166.
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