Surface chemistry of Al(CH3)3 and TiCl4 on GaAs(100) and InGaAs during the first half-cycle of atomic layer deposition

Bernal Granados, Fee Li Lie, Anthony J Muscat

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)906-907
Number of pages2
JournalMicroscopy and Microanalysis
Volume18
DOIs
StatePublished - 2012

ASJC Scopus subject areas

  • Instrumentation

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