Surface chemistry of GaAs(100) and InAs(100) etching with tartaric acid

Pablo Mancheno-Posso, Anthony J Muscat

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)
Original languageEnglish (US)
Title of host publicationSolid State Phenomena
PublisherTrans Tech Publications Ltd
Pages52-55
Number of pages4
Volume219
ISBN (Print)9783038352426
DOIs
StatePublished - 2015
Event12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014 - Brussels, Belgium
Duration: Sep 21 2014Sep 24 2014

Publication series

NameSolid State Phenomena
Volume219
ISSN (Electronic)16629779

Other

Other12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014
CountryBelgium
CityBrussels
Period9/21/149/24/14

Fingerprint

Indium arsenide
Hydrochloric Acid
Gallium arsenide
hydrochloric acid
Hydrochloric acid
Temperature programmed desorption
Surface chemistry
hydrogen peroxide
Hydrogen peroxide
Hydrogen Peroxide
Etching
X ray photoelectron spectroscopy
etching
chemistry
acids
Acids
indium arsenide
gallium arsenide
tartaric acid

Keywords

  • Etching
  • Gallium arsenide
  • Hydrochloric acid
  • Hydrogen peroxide
  • Indium arsenide
  • Tartaric acid
  • Temperature programmed desorption
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics

Cite this

Mancheno-Posso, P., & Muscat, A. J. (2015). Surface chemistry of GaAs(100) and InAs(100) etching with tartaric acid. In Solid State Phenomena (Vol. 219, pp. 52-55). (Solid State Phenomena; Vol. 219). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.219.52

Surface chemistry of GaAs(100) and InAs(100) etching with tartaric acid. / Mancheno-Posso, Pablo; Muscat, Anthony J.

Solid State Phenomena. Vol. 219 Trans Tech Publications Ltd, 2015. p. 52-55 (Solid State Phenomena; Vol. 219).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mancheno-Posso, P & Muscat, AJ 2015, Surface chemistry of GaAs(100) and InAs(100) etching with tartaric acid. in Solid State Phenomena. vol. 219, Solid State Phenomena, vol. 219, Trans Tech Publications Ltd, pp. 52-55, 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014, Brussels, Belgium, 9/21/14. https://doi.org/10.4028/www.scientific.net/SSP.219.52
Mancheno-Posso P, Muscat AJ. Surface chemistry of GaAs(100) and InAs(100) etching with tartaric acid. In Solid State Phenomena. Vol. 219. Trans Tech Publications Ltd. 2015. p. 52-55. (Solid State Phenomena). https://doi.org/10.4028/www.scientific.net/SSP.219.52
Mancheno-Posso, Pablo ; Muscat, Anthony J. / Surface chemistry of GaAs(100) and InAs(100) etching with tartaric acid. Solid State Phenomena. Vol. 219 Trans Tech Publications Ltd, 2015. pp. 52-55 (Solid State Phenomena).
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