Surface profiler for fixed through glass measurement

Sen Han, Erik Novak, John W Wissinger, Bryan Guenther, Trisha Browne, Emilio Yanine, Mike Schurig, J. D. Herron, Christy McCloy, Xueyuan Li, Michael Krell, Jim Harris

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

An interferometric surface profiler for high-magnification fixed through glass measurement (patent pending), such as for a packaged MEMS or MOEMS measurement, is described in this paper. Three techniques are introduced into the profiler, including aberration correction and long working distance for the objective, substantially shaped illumination and dispersive compensation. Measurement results illuminate that the data of the through glass objective are very close to those of the standard objective.

Original languageEnglish (US)
Title of host publicationProgress in Biomedical Optics and Imaging - Proceedings of SPIE
EditorsD.M. Tanner, R. Ramesham
Pages189-197
Number of pages9
Volume5716
DOIs
StatePublished - 2005
Externally publishedYes
EventReliability, Packaging, Testing and Characterization of MEMS/MOEMS IV - San Jose, CA, United States
Duration: Jan 24 2005Jan 25 2005

Other

OtherReliability, Packaging, Testing and Characterization of MEMS/MOEMS IV
CountryUnited States
CitySan Jose, CA
Period1/24/051/25/05

Fingerprint

Glass
MOEMS
Aberrations
MEMS
Lighting
Compensation and Redress

Keywords

  • Interferometric profiler
  • Packaged MEMS or MOEMs measurement
  • Surface profiler
  • Through glass measurement

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Han, S., Novak, E., Wissinger, J. W., Guenther, B., Browne, T., Yanine, E., ... Harris, J. (2005). Surface profiler for fixed through glass measurement. In D. M. Tanner, & R. Ramesham (Eds.), Progress in Biomedical Optics and Imaging - Proceedings of SPIE (Vol. 5716, pp. 189-197). [24] https://doi.org/10.1117/12.597080

Surface profiler for fixed through glass measurement. / Han, Sen; Novak, Erik; Wissinger, John W; Guenther, Bryan; Browne, Trisha; Yanine, Emilio; Schurig, Mike; Herron, J. D.; McCloy, Christy; Li, Xueyuan; Krell, Michael; Harris, Jim.

Progress in Biomedical Optics and Imaging - Proceedings of SPIE. ed. / D.M. Tanner; R. Ramesham. Vol. 5716 2005. p. 189-197 24.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Han, S, Novak, E, Wissinger, JW, Guenther, B, Browne, T, Yanine, E, Schurig, M, Herron, JD, McCloy, C, Li, X, Krell, M & Harris, J 2005, Surface profiler for fixed through glass measurement. in DM Tanner & R Ramesham (eds), Progress in Biomedical Optics and Imaging - Proceedings of SPIE. vol. 5716, 24, pp. 189-197, Reliability, Packaging, Testing and Characterization of MEMS/MOEMS IV, San Jose, CA, United States, 1/24/05. https://doi.org/10.1117/12.597080
Han S, Novak E, Wissinger JW, Guenther B, Browne T, Yanine E et al. Surface profiler for fixed through glass measurement. In Tanner DM, Ramesham R, editors, Progress in Biomedical Optics and Imaging - Proceedings of SPIE. Vol. 5716. 2005. p. 189-197. 24 https://doi.org/10.1117/12.597080
Han, Sen ; Novak, Erik ; Wissinger, John W ; Guenther, Bryan ; Browne, Trisha ; Yanine, Emilio ; Schurig, Mike ; Herron, J. D. ; McCloy, Christy ; Li, Xueyuan ; Krell, Michael ; Harris, Jim. / Surface profiler for fixed through glass measurement. Progress in Biomedical Optics and Imaging - Proceedings of SPIE. editor / D.M. Tanner ; R. Ramesham. Vol. 5716 2005. pp. 189-197
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