Surface reconstruction based on transmission interferometric testing

Kibyung Seong, John E Greivenkamp

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A method of surface figure measurement is described based on the transmitted wavefront of an optical element obtained from a Mach-Zehnder interferometer. Given known values for the refractive index and center thickness, along with the samples transmitted wavefront, the unknown surface profile is reconstructed in a deterministic way. The technique relies on knowledge of one of the surfaces of the element, such as an easy to measure piano or spherical surface, and is well-suited for testing aspheric surfaces. Reverse raytracing is used to remove the effects of transmission through a thick lens and to remove induced aberration associated with the interferometer. In the interferometer, the wavefront transmitted through the sample is tested against a plano reference. In order to reduce the high frequency fringe content of the interferogram, the sample can be tested in an immersion solution. This method also has the ability to make measurements on multiplexed surfaces, such as a lenslet array, which traditionally can not be measured without moving the sample. The surface profile of a plano-convex lens has been produced and verified against other metrology techniques for calibration purposes. Surface measurements on a lenslet array are also presented.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6671
DOIs
StatePublished - 2007
EventOptical Manufacturing and Testing VII - San Diego, CA, United States
Duration: Aug 28 2007Aug 29 2007

Other

OtherOptical Manufacturing and Testing VII
CountryUnited States
CitySan Diego, CA
Period8/28/078/29/07

Fingerprint

Surface reconstruction
Testing
Wavefronts
Interferometers
Lenses
interferometers
lenses
Mach-Zehnder interferometers
Surface measurement
Optical devices
Aberrations
profiles
Refractive index
metrology
submerging
aberration
interferometry
Calibration
refractivity

Keywords

  • Aspheric surfaces
  • Immersion
  • Lens array
  • Surface figure measurement
  • Transmitted wavefront

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Seong, K., & Greivenkamp, J. E. (2007). Surface reconstruction based on transmission interferometric testing. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6671). [66710M] https://doi.org/10.1117/12.732646

Surface reconstruction based on transmission interferometric testing. / Seong, Kibyung; Greivenkamp, John E.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6671 2007. 66710M.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Seong, K & Greivenkamp, JE 2007, Surface reconstruction based on transmission interferometric testing. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 6671, 66710M, Optical Manufacturing and Testing VII, San Diego, CA, United States, 8/28/07. https://doi.org/10.1117/12.732646
Seong K, Greivenkamp JE. Surface reconstruction based on transmission interferometric testing. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6671. 2007. 66710M https://doi.org/10.1117/12.732646
Seong, Kibyung ; Greivenkamp, John E. / Surface reconstruction based on transmission interferometric testing. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6671 2007.
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