Surface reconstruction based on transmission interferometric testing

Kibyung Seong, John E. Greivenkamp

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A method of surface figure measurement is described based on the transmitted wavefront of an optical element obtained from a Mach-Zehnder interferometer. Given known values for the refractive index and center thickness, along with the samples transmitted wavefront, the unknown surface profile is reconstructed in a deterministic way. The technique relies on knowledge of one of the surfaces of the element, such as an easy to measure piano or spherical surface, and is well-suited for testing aspheric surfaces. Reverse raytracing is used to remove the effects of transmission through a thick lens and to remove induced aberration associated with the interferometer. In the interferometer, the wavefront transmitted through the sample is tested against a plano reference. In order to reduce the high frequency fringe content of the interferogram, the sample can be tested in an immersion solution. This method also has the ability to make measurements on multiplexed surfaces, such as a lenslet array, which traditionally can not be measured without moving the sample. The surface profile of a plano-convex lens has been produced and verified against other metrology techniques for calibration purposes. Surface measurements on a lenslet array are also presented.

Original languageEnglish (US)
Title of host publicationOptical Manufacturing and Testing VII
DOIs
StatePublished - Dec 1 2007
EventOptical Manufacturing and Testing VII - San Diego, CA, United States
Duration: Aug 28 2007Aug 29 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6671
ISSN (Print)0277-786X

Other

OtherOptical Manufacturing and Testing VII
CountryUnited States
CitySan Diego, CA
Period8/28/078/29/07

Keywords

  • Aspheric surfaces
  • Immersion
  • Lens array
  • Surface figure measurement
  • Transmitted wavefront

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Seong, K., & Greivenkamp, J. E. (2007). Surface reconstruction based on transmission interferometric testing. In Optical Manufacturing and Testing VII [66710M] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6671). https://doi.org/10.1117/12.732646